Measurement of spatial coherence of electron beams by using a small selected-area aperture

Ultramicroscopy

Volumn 129, Issue , 2013, Pages 10-17

  Morishita, Shigeyuki ^a   Yamasaki, Jun ^a   Tanaka, Nobuo ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

Airy pattern; Coherence length; Electron beam; Selected area diffraction; Spatial coherence; Transmission electron microscope

Indexed keywords

AIRY PATTERNS; COHERENCE LENGTHS; SELECTED AREA DIFFRACTION; SPATIAL COHERENCE; TRANSMISSION ELECTRON MICROSCOPE;

DIFFRACTION; TRANSMISSION ELECTRON MICROSCOPY;

ELECTRON BEAMS;

ANALYTICAL EQUIPMENT; ANALYTICAL PARAMETERS; ANGULAR SIZE; ARTICLE; CONDENSER APERTURE; CONTROLLED STUDY; DIFFRACTION; ELECTRON BEAM; ELECTRON DIFFRACTIVE IMAGING; ILLUMINATION; IMAGING; MEASUREMENT; OPTICAL INSTRUMENTATION; SPATIAL COHERENCE; TRANSMISSION ELECTRON MICROSCOPY;

EID: 84875772230     PISSN: 03043991     EISSN: 18792723     Source Type: Journal    
DOI: 10.1016/j.ultramic.2013.02.019     Document Type: Article

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