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Volumn 93, Issue 18, 2008, Pages
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Diffractive imaging of the dumbbell structure in silicon by spherical-aberration-corrected electron diffraction
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Author keywords
[No Author keywords available]
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Indexed keywords
ABERRATIONS;
DIFFRACTION;
ELECTRON BEAMS;
ELECTRON GUNS;
ELECTRONS;
OPTICAL PROPERTIES;
PARTICLE BEAMS;
SEMICONDUCTING SILICON COMPOUNDS;
SILICON;
SPHERES;
THICK FILMS;
TRANSMISSION ELECTRON MICROSCOPY;
ATOMIC RESOLUTIONS;
CRYSTALLINE SILICONS;
DIFFRACTIVE IMAGING;
EMPTY SPACES;
LOCALIZED STRUCTURES;
PRESENT METHODS;
SELECTED AREA DIFFRACTIONS;
SPATIAL RESOLUTIONS;
THIN FILM SAMPLES;
TRANSMISSION ELECTRON MICROSCOPES;
CRYSTAL ATOMIC STRUCTURE;
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EID: 55849092888
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.3003582 Document Type: Article |
Times cited : (52)
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References (18)
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