Advance in multi-hit detection and quantization in atom probe tomography

Review of Scientific Instruments

Volumn 83, Issue 12, 2012, Pages

  Da Costa, G ^a   Wang, H ^a   Duguay, S ^a   Bostel, A ^a   Blavette, D ^a   Deconihout, B ^a  

^a CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ATOM PROBE TOMOGRAPHY; BORON IN SILICON; CHEMICAL COMPOSITIONS; CONCENTRATION MEASUREMENT; FIELD EVAPORATION; INNOVATIVE METHOD; POSITION SENSITIVE; POSITION-SENSITIVE DETECTORS;

DETECTORS; PHASE TRANSITIONS; SIGNAL PROCESSING;

EVAPORATION;

EID: 84875469642     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4770120     Document Type: Article

References (24)

1. T. F., Kelly and M. K., Miller, Rev. Sci. Instrum., 78, 031101 (2007). 10.1063/1.2709758
2. B., Gault, F., Vurpillot, A., Vella, M., Gilbert, A., Menand, D., Blavette, and B., Deconihout, Rev. Sci. Instrum., 77, 043705 (2006). 10.1063/1.2194089
3. D., Blavette, T. Al, Kassab, E., Cadel, A., Mackel, F., Vurpillot, M., Gilbert, O., Cojocaru, and B., Deconihout, Int. J. Mater. Res., 99 (5), 454-460 (2008). 10.3139/146.101672
4. K., Hoummada, E., Cadel, D., Mangelinck, C., Perrin-Pellegrino, D., Blavette, and B., Deconihout, Appl. Phys. Lett., 89, 181905 (2006). 10.1063/1.2370501
5. D. E., Perea, E. R., Hemesath, E. J., Schwalbach, J. L., Lensch-Falk, P. W., Voorhees, and L. J., Lauhon, " Direct measurement of dopant distribution in an individual vapour-liquid-solid nanowire, ", Nat. Nanotechnol., 4, 315-319 (2009). 10.1038/nnano.2009.51
6. M. K., Miller, A., Cerezo, M. G., Hetherington, and G. D. W., Smith, Atom Probe Field Ion Microscopy (Oxford University Press, Oxford, 2005).
7. D., Blavette, S., Duguay, and P., Pareige, Journ. Mater. Res., 2011 (9), 1074-1081 (2011), Special Issue dedicated to Professor Wollenberger.
8. F., Vurpillot, A., Bostel, and D., Blavette, Appl. Phys. Lett., 76, 3127-3129 (2000). 10.1063/1.126545
9. G., Sha and S. P., Ringer, Ultramicroscopy, 109, 580 (2009). 10.1016/j.ultramic.2008.10.012
10. W., Lefebvre, F., Danoix, G., Da Costa, F., De Geuser, H., Hallern, A., Deschamps, and M., Dumont, Surf. Interface Anal., 39 (2-3), 206-212 (2007). 10.1002/sia.2516
11. F., De Geuser, B., Gault, A., Bostel, and F., Vurpillot, Surf. Sci., 601 (2), 536-543 (2007). 10.1016/j.susc.2006.10.019
12. K., Thompson, J. H., Bunton, T. F., Kelly, and D. J., Larson, J. Vac. Sci. Technol. B, 24, 412 (2006). 10.1116/1.2141621
13. S., Duguay, T., Philippe, F., Cristiano, and D., Blavette, Appl. Phys. Lett., 97, 242104 (2010). 10.1063/1.3526376
14. D., Blavette, P., Duval, L., Letellier, and M., Guttman, Acta Mater., 44 (12), 4995-5005 (1996). 10.1016/S1359-6454(96)00087-0
15. M., Gruber, F., Vurpillot, A., Bostel, and B., Deconihout, Surf. Sci., 605, 2025-2031 (2011). 10.1016/j.susc.2011.07.022
16. H., Keller, G., Klingelhfer, and E., Kankeleit, Nucl. Instrum. Methods Phys. Res. A, 258, 221 (1987). 10.1016/0168-9002(87)90059-3
17. G., Da Costa, F., Vurpillot, A., Bostel, M., Bouet, and B., Deconihout, Rev. Sci. Instrum., 76, 013304 (2005). 10.1063/1.1829975
18. I. M., Ismail, M., Barat, J. C., Brenot, J. A., Fayeton, V., Lepere, and Y. J., Picard, Rev. Sci. Instrum., 76 (4), 043304 (2005). 10.1063/1.1889326
19. O., Cojocaru-Miredin, E., Cadel, F., Vurpillot, D., Mangelinck, and D., Blavette, Scr. Mater., 60, 285-288 (2009). 10.1016/j.scriptamat.2008.10.008
20. M., Ngamo, S., Duguay, F., Cristiano, K., Daoud-Ketata, and P., Pareige, " Atomic scale study of boron interstitial clusters in ion-implanted silicon. ", J. Appl. Phys., 105, 104904 (2009). 10.1063/1.3126498
21. K., Thompson, J., Booske, D., Larson, and T., Kelly, Appl. Phys. Lett., 87, 052108 (2005). 10.1063/1.2005368
22. P. A., Ronsheim, M., Hatzistergos, and S., Jin, J. Vac. Sci. Technol. B, 28, C1E1 (2010). 10.1116/1.3242422
23. C., Dubois, G., Prudon, and B., Gautier, et al., Appl. Surf. Sci., 255 (4), 1377-1380 (2008). 10.1016/j.apsusc.2008.05.051
24. T., Philippe, F., De Geuser, S., Duguay, W., Lefebvre, O., Cojocaru-Miredin, G., Da Costa, and D., Blavette, " Clustering and nearest neighbour distances in atom probe tomography, ", Ultramicroscopy, 109, 1304 (2009). 10.1016/j.ultramic.2009.06.007