The effect of neutron irradiation on the properties of SiC and SiC(N) layer prepared by plasma enhanced chemical vapor deposition

Applied Surface Science

Volumn 269, Issue , 2013, Pages 88-91

  Huran, Jozef ^a   Valovič, Albín ^a   Boháček, Pavol ^a   Shvetsov, Valery N ^b   Kobzev, Alexander P ^b   Borzakov, Sergey B ^b   Kleinová, Angela ^c   Sekáčová, Mária ^a   Arbet, Juraj ^a   Sasinková, Vlasta ^d  

^a INSTITUTE OF ELECTRICAL ENGINEERING   (Slovakia)

^b JOINT INSTITUTE FOR NUCLEAR RESEARCH   (Russian Federation)

^c POLYMER INSTITUTE   (Slovakia)

^d INSTITUTE OF CHEMISTRY   (Slovakia)

Author keywords

Neutron irradiation; Plasma CVD; Silicon carbide layer; Structural and electrical characterization

Indexed keywords

AMORPHOUS SILICON; CHEMICAL ANALYSIS; DOPING (ADDITIVES); FOURIER TRANSFORM INFRARED SPECTROSCOPY; NEUTRON IRRADIATION; NEUTRONS; NITROGEN PLASMA; PASSIVATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RADIATION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON CARBIDE; SILICON SOLAR CELLS;

AMORPHOUS SILICON CARBIDE (A-SIC); ELASTIC RECOIL DETECTION; ELECTRICAL CHARACTERIZATION; FOURIER TRANSFORM INFRA RED (FTIR) SPECTROSCOPY; NITROGEN DOPED SILICONS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITIONS (PE CVD); RUTHERFORD BACKSCATTERING SPECTROMETRY; SILICON CARBIDES (SIC);

PLASMA CVD;

EID: 84875420569     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2012.10.162     Document Type: Conference Paper

References (20)

1. D. Pysch, J. Ziegler, J.-P. Becker, D. Suwito, S. Janz, S.W. Glunz, and M. Hermle Proceedings of 34th IEEE Photovoltaic Specialists Conference (PVSC) 2009 794 799
2. S. Janz, S. Reber, and W. Glunz Proceedings of the 21st EUPVSEC 2006 660 663
3. D. Pysch, M. Bivour, M. Hermle, and W. Glunz Thin Solid Films 519 2011 2550 2554
4. H. Colder, P. Marie, L. Pichon, and R. Rizk Physica Status Solidi C 1 2004 269 273
5. M. Vetter, C. Voz, R. Ferre, I. Martín, A. Orpella, J. Puigdollers, J. Andreu, and R. Alcubilla Thin Solid Films 511-512 2006 290 294
6. W. Daves, A. Krauss, N. Behnel, V. Häublein, A. Bauer, and L. Frey Thin Solid Films 519 2011 5892 5898
7. S. Sciortino, F. Hartjes, S. Lagomarsino, F. Nava, M. Brianzi, V. Cindro, C. Lanzieri, M. Moll, and P. Vanni Nuclear Instruments & Methods in Physics Research A 552 2005 138 145
8. G.A. Liu, E.Q. Xie, and T.M. Wang Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams 15 2003 271 274
9. A. Gali, P. Deák, P. Ordejón, N.T. Son, E. Janzén, and W.J. Choyke Physical Review B 68 2003 125201
10. J. Huran, I. Hotovy, J. Pezoldt, N.I. Balalykin, and A.P. Kobzev Thin Solid Films 515 2006 651 653
11. A.P. Kobzev, J. Huran, D. Maczka, and M. Turek Vacuum 83 2009 S124 S126
12. M. Vetter, I. Martín, A. Orpella, J. Puigdollers, C. Voz, and R. Alcubilla Thin Solid Films 451-452 2004 340 344
13. P. Gao, J. Xu, Y. Piao, W. Ding, D. Wang, X. Deng, and C. Dong Surface and Coatings Technology 201 2007 5298 5301
14. M.N. Fraga, M. Massi, I.C. Oliviera, H.S. Maciel, S.G.S. Filho, and R.D. Mansano Journal of Materials Science 19 2008 835 840
15. M. Künle, T. Kaltenbach, P. Loper, A. Hartel, S. Janz, O. Eibl, and K-G. Nickel Thin Solid Films 519 2010 151 157
16. V.M. Ng, M. Xu, S.Y. Huang, J.D. Long, and S. Xu Thin Solid Films 506-507 2006 283 287
17. J.K. Seo, Y-H. Joung, Y. Park, and W.S. Choi Thin Solid Films 519 2011 6654 6657
18. T. Chen, Y. Huang, D. Yang, R. Carius, and F. Finger Thin Solid Films 519 2011 4523 4526
19. J. Singh, and J. MatSci. Materials in Electronics 14 2003 171 186
20. H.T.M. Pham, T. Akkaya, C. de Boer, C.C.G. Visser, and P.M. Sarro Proc. SeSens 2002 Veldhoven 2002 662 666