Monolithic integration fabrication process of thermoelectric and vibrational devices for microelectromechanical system power generator

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 46, Issue 9 A, 2007, Pages 6062-6067

  Sato, Norio ^a   Kuwabara, Kei ^a   Ono, Kazuyoshi ^a   Sakata, Tomomi ^a   Morimura, Hiroki ^a   Terada, Jun ^a   Kudou, Kazuhisa ^b   Kamei, Toshikazu ^b   Yano, Masaki ^b   Machida, Katsuyuki ^b   Ishii, Hiromu ^a  

^a NTT CORPORATION   (Japan)

^b NTT Advanced Technology Corporation   (Japan)

Author keywords

Integration; Microelectromechanical system; Power generator; Thermoelectric; Vibrational

Indexed keywords

MEMS; POWER GENERATION; REACTIVE ION ETCHING; SILICON;

POWER GENERATORS; THERMOELECTRICS;

MONOLITHIC INTEGRATED CIRCUITS;

EID: 34548725644     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.46.6062     Document Type: Article

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