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Volumn 9, Issue 5, 2013, Pages 711-715

Large area resist-free soft lithographic patterning of graphene

(8) George, Antony a Mathew, S b Van Gastel, Raoul a Nijland, Maarten a Gopinadhan, K b Brinks, Peter a Venkatesan, T b Ten Elshof, Johan E a

a UNIVERSITY OF TWENTE (Netherlands)

b NATIONAL UNIVERSITY OF SINGAPORE (Singapore)

Author keywords

graphene; patterning; plasma etching; resist free patterning; soft lithography

Indexed keywords

COST EFFECTIVE; DEVICE APPLICATION; GRAPHENE FILMS; LARGE-AREA PATTERNING; LITHOGRAPHIC PATTERNING; LOW-COST PATTERNING; PATTERNING; RESIST-FREE PATTERNING; SINGLE-STEP; SOFT LITHOGRAPHY;

PLASMA ETCHING;

GRAPHENE;

EID: 84874700557 PISSN: 16136810 EISSN: 16136829 Source Type: Journal
DOI: 10.1002/smll.201201889 Document Type: Article

Times cited : (30)

References (37)

1
- 77956963862
- Y. Zhu, S. Murali, W. Cai, X. Li, J. W. Suk, J. R. Potts, R. S. Ruoff, Adv. Mater. 2010, 22, 3906.
- (2010) Adv. Mater. , vol.22 , pp. 3906
- Zhu, Y.¹ Murali, S.² Cai, W.³ Li, X.⁴ Suk, J.W.⁵ Potts, J.R.⁶ Ruoff, R.S.⁷

2
- 79953758358
- Y. Wu, Y.-m. Lin, A. A. Bol, K. A. Jenkins, F. Xia, D. B. Farmer, Y. Zhu, P. Avouris, Nature 2011, 472, 74.
- (2011) Nature , vol.472 , pp. 74
- Wu, Y.¹ Lin, Y.-M.² Bol, A.A.³ Jenkins, K.A.⁴ Xia, F.⁵ Farmer, D.B.⁶ Zhu, Y.⁷ Avouris, P.⁸

3
- 77955231284
- F. Schwierz, Nat. Nanotechnol. 2010, 5, 487.
- (2010) Nat. Nanotechnol. , vol.5 , pp. 487
- Schwierz, F.¹

4
- 55549145154
- P. K. Ang, W. Chen, A. T. S. Wee, K. P. Loh, J. Am. Chem. Soc. 2008, 130, 14392.
- (2008) J. Am. Chem. Soc. , vol.130 , pp. 14392
- Ang, P.K.¹ Chen, W.² Wee, A.T.S.³ Loh, K.P.⁴

5
- 80051621775
- P. Dhiman, F. Yavari, X. Mi, H. Gullapalli, Y. Shi, P. M. Ajayan, N. Koratkar, Nano Lett. 2011, 11, 3123.
- (2011) Nano Lett. , vol.11 , pp. 3123
- Dhiman, P.¹ Yavari, F.² Mi, X.³ Gullapalli, H.⁴ Shi, Y.⁵ Ajayan, P.M.⁶ Koratkar, N.⁷

6
- 79955623643
- K.-Y. Shin, J.-Y. Hong, J. Jang, Adv. Mater. 2011, 23, 2113.
- (2011) Adv. Mater. , vol.23 , pp. 2113
- Shin, K.-Y.¹ Hong, J.-Y.² Jang, J.³

7
- 79959947809
- S. Pang, Y. Hernandez, X. Feng, K. Müllen, Adv. Mater. 2011, 23, 2779.
- (2011) Adv. Mater. , vol.23 , pp. 2779
- Pang, S.¹ Hernandez, Y.² Feng, X.³ Müllen, K.⁴

8
- 59649099717
- K. S. Kim, Y. Zhao, H. Jang, S. Y. Lee, J. M. Kim, K. S. Kim, J.-H. Ahn, P. Kim, J.-Y. Choi, B. H. Hong, Nature 2009, 457, 706.
- (2009) Nature , vol.457 , pp. 706
- Kim, K.S.¹ Zhao, Y.² Jang, H.³ Lee, S.Y.⁴ Kim, J.M.⁵ Kim, K.S.⁶ Ahn, J.-H.⁷ Kim, P.⁸ Choi, J.-Y.⁹ Hong, B.H.¹⁰

9
- 80052818886
- F. Withers, T. H. Bointon, M. Dubois, S. Russo, M. F. Craciun, Nano Lett. 2011, 11, 3912.
- (2011) Nano Lett. , vol.11 , pp. 3912
- Withers, F.¹ Bointon, T.H.² Dubois, M.³ Russo, S.⁴ Craciun, M.F.⁵

10
- 79960459581
- Z. Shi, R. Yang, L. Zhang, Y. Wang, D. Liu, D. Shi, E. Wang, G. Zhang, Adv. Mater. 2011, 23, 3061.
- (2011) Adv. Mater. , vol.23 , pp. 3061
- Shi, Z.¹ Yang, R.² Zhang, L.³ Wang, Y.⁴ Liu, D.⁵ Shi, D.⁶ Wang, E.⁷ Zhang, G.⁸

11
- 80053251948
- J. Fan, J. M. Michalik, L. Casado, S. Roddaro, M. R. Ibarra, J. M. De Teresa, Solid State Commun. 2011, 151, 1574.
- (2011) Solid State Commun. , vol.151 , pp. 1574
- Fan, J.¹ Michalik, J.M.² Casado, L.³ Roddaro, S.⁴ Ibarra, M.R.⁵ De Teresa, J.M.⁶

12
- 79952402082
- L. Liu, Y. Zhang, W. Wang, C. Gu, X. Bai, E. Wang, Adv. Mater. 2011, 23, 1246.
- (2011) Adv. Mater. , vol.23 , pp. 1246
- Liu, L.¹ Zhang, Y.² Wang, W.³ Gu, C.⁴ Bai, X.⁵ Wang, E.⁶

13
- 67049088338
- C. X. Cong, T. Yu, Z. H. Ni, L. Liu, Z. X. Shen, W. Huang, J. Phys. Chem. C 2009, 113, 6529.
- (2009) J. Phys. Chem. C , vol.113 , pp. 6529
- Cong, C.X.¹ Yu, T.² Ni, Z.H.³ Liu, L.⁴ Shen, Z.X.⁵ Huang, W.⁶

14
- 66249089071
- M. J. Allen, V. C. Tung, L. Gomez, Z. Xu, L.-M. Chen, K. S. Nelson, C. Zhou, R. B. Kaner, Y. Yang, Adv. Mater. 2009, 21, 2098.
- (2009) Adv. Mater. , vol.21 , pp. 2098
- Allen, M.J.¹ Tung, V.C.² Gomez, L.³ Xu, Z.⁴ Chen, L.-M.⁵ Nelson, K.S.⁶ Zhou, C.⁷ Kaner, R.B.⁸ Yang, Y.⁹

15
- 79953763674
- R. K. Puddy, P. H. Scard, D. Tyndall, M. R. Connolly, C. G. Smith, G. A. C. Jones, A. Lombardo, A. C. Ferrari, M. R. Buitelaar, Appl. Phys. Lett. 2011, 98, 133120.
- (2011) Appl. Phys. Lett. , vol.98 , pp. 133120
- Puddy, R.K.¹ Scard, P.H.² Tyndall, D.³ Connolly, M.R.⁴ Smith, C.G.⁵ Jones, G.A.C.⁶ Lombardo, A.⁷ Ferrari, A.C.⁸ Buitelaar, M.R.⁹

16
- 84874699581
- Florida, USA, May
- D. S. Pickard, S. Mathew, B. Özyilmaz, J. Thong, V. Venkatesan, V. Viswanathan, Z. Wang, presented at the Int. Conf. on Electron, Ion, Photon Beam Technology and Nanofabrication (EIPBN09), Florida, USA, May 2009.
- (2009) Int. Conf. on Electron, Ion, Photon Beam Technology and Nanofabrication (EIPBN09)
- Pickard, D.S.¹ Mathew, S.² Özyilmaz, B.³ Thong, J.⁴ Venkatesan, V.⁵ Viswanathan, V.⁶ Wang, Z.⁷

17
- 70350608318
- D. C. Bell, M. C. Lemme, L. A. Stern, J. R. Williams, C. M. Marcus, Nanotechnology 2009, 20, 455301.
- (2009) Nanotechnology , vol.20 , pp. 455301
- Bell, D.C.¹ Lemme, M.C.² Stern, L.A.³ Williams, J.R.⁴ Marcus, C.M.⁵

18
- 80053331211
- A. George, A. W. Maijenburg, M. G. Maas, D. H. A. Blank, J. E. ten Elshof, Langmuir 2011, 27, 12235.
- (2011) Langmuir , vol.27 , pp. 12235
- George, A.¹ Maijenburg, A.W.² Maas, M.G.³ Blank, D.H.A.⁴ Ten Elshof, J.E.⁵

19
- 68249142758
- M.-H. Lin, C.-F. Chen, H.-W. Shiu, C.-H. Chen, S. Gwo, J. Am. Chem. Soc. 2009, 131, 10984.
- (2009) J. Am. Chem. Soc. , vol.131 , pp. 10984
- Lin, M.-H.¹ Chen, C.-F.² Shiu, H.-W.³ Chen, C.-H.⁴ Gwo, S.⁵

20
- 83455259585
- A. George, T. M. Stawski, S. Unnikrishnan, S. A. Veldhuis, J. E. ten Elshof, J. Mater. Chem. 2012, 22, 328.
- (2012) J. Mater. Chem. , vol.22 , pp. 328
- George, A.¹ Stawski, T.M.² Unnikrishnan, S.³ Veldhuis, S.A.⁴ Ten Elshof, J.E.⁵

21
- 66749119012
- X. Li, W. Cai, J. An, S. Kim, J. Nah, D. Yang, R. Piner, A. Velamakanni, I. Jung, E. Tutuc, S. K. Banerjee, L. Colombo, R. S. Ruoff, Science 2009, 324, 1312.
- (2009) Science , vol.324 , pp. 1312
- Li, X.¹ Cai, W.² An, J.³ Kim, S.⁴ Nah, J.⁵ Yang, D.⁶ Piner, R.⁷ Velamakanni, A.⁸ Jung, I.⁹ Tutuc, E.¹⁰ Banerjee, S.K.¹¹ Colombo, L.¹² Ruoff, R.S.¹³

22
- 84860385148
- F. Torrisi, T. Hasan, W. Wu, Z. Sun, A. Lombardo, T. S. Kulmala, G.-W. Hsieh, S. Jung, F. Bonaccorso, P. J. Paul, D. Chu, A. C. Ferrari, ACS Nano 2012, 6, 2992.
- (2012) ACS Nano , vol.6 , pp. 2992
- Torrisi, F.¹ Hasan, T.² Wu, W.³ Sun, Z.⁴ Lombardo, A.⁵ Kulmala, T.S.⁶ Hsieh, G.-W.⁷ Jung, S.⁸ Bonaccorso, F.⁹ Paul, P.J.¹⁰ Chu, D.¹¹ Ferrari, A.C.¹²

23
- 80053318158
- J. W. Suk, A. Kitt, C. W. Magnuson, Y. Hao, S. Ahmed, J. An, A. K. Swan, B. B. Goldberg, R. S. Ruoff, ACS Nano 2011, 5, 6916.
- (2011) ACS Nano , vol.5 , pp. 6916
- Suk, J.W.¹ Kitt, A.² Magnuson, C.W.³ Hao, Y.⁴ Ahmed, S.⁵ An, J.⁶ Swan, A.K.⁷ Goldberg, B.B.⁸ Ruoff, R.S.⁹

24
- 77649176721
- D. M. Basko, S. Piscanec, A. C. Ferrari, Phys. Rev. B 2009, 80, 165413.
- (2009) Phys. Rev. B , vol.80 , pp. 165413
- Basko, D.M.¹ Piscanec, S.² Ferrari, A.C.³

25
- 65249171961
- Z. H. Ni, T. Yu, Z. Q. Luo, Y. Y. Wang, L. Liu, C. P. Wong, J. Miao, W. Huang, Z. X. Shen, ACS Nano 2009, 3, 569.
- (2009) ACS Nano , vol.3 , pp. 569
- Ni, Z.H.¹ Yu, T.² Luo, Z.Q.³ Wang, Y.Y.⁴ Liu, L.⁵ Wong, C.P.⁶ Miao, J.⁷ Huang, W.⁸ Shen, Z.X.⁹

26
- 77958078134
- Z. H. Ni, L. A. Ponomarenko, R. R. Nair, R. Yang, S. Anissimova, I. V. Grigorieva, F. Schedin, P. Blake, Z. X. Shen, E. H. Hill, K. S. Novoselov, A. K. Geim, Nano Lett. 2010, 10, 3868.
- (2010) Nano Lett. , vol.10 , pp. 3868
- Ni, Z.H.¹ Ponomarenko, L.A.² Nair, R.R.³ Yang, R.⁴ Anissimova, S.⁵ Grigorieva, I.V.⁶ Schedin, F.⁷ Blake, P.⁸ Shen, Z.X.⁹ Hill, E.H.¹⁰ Novoselov, K.S.¹¹ Geim, A.K.¹²

27
- 81855218266
- X. Liang, B. A. Sperling, I. Calizo, G. Cheng, C. A. Hacker, Q. Zhang, Y. Obeng, K. Yan, H. Peng, Q. Li, X. Zhu, H. Yuan, A. R. Hight Walker, Z. Liu, L.-m. Peng, C. A. Richter, ACS Nano 2011, 5, 9144.
- (2011) ACS Nano , vol.5 , pp. 9144
- Liang, X.¹ Sperling, B.A.² Calizo, I.³ Cheng, G.⁴ Hacker, C.A.⁵ Zhang, Q.⁶ Obeng, Y.⁷ Yan, K.⁸ Peng, H.⁹ Li, Q.¹⁰ Zhu, X.¹¹ Yuan, H.¹² Walker, A.R.H.¹³ Liu, Z.¹⁴ Peng, L.-M.¹⁵ Richter, C.A.¹⁶

28
- 79951873658
- C. Mattevi, H. Kim, M. Chhowalla, J. Mater. Chem. 2011, 21, 3324-3334.
- (2011) J. Mater. Chem. , vol.21 , pp. 3324-3334
- Mattevi, C.¹ Kim, H.² Chhowalla, M.³

29
- 33749501025
- E. McCann, K. Kechedzhi, V. I. Fal'ko, H. Suzuura, T. Ando, B. L. Altshuler, Phys. Rev. Lett. 2006, 97, 146805.
- (2006) Phys. Rev. Lett. , vol.97 , pp. 146805
- McCann, E.¹ Kechedzhi, K.² Fal'Ko, V.I.³ Suzuura, H.⁴ Ando, T.⁵ Altshuler, B.L.⁶

30
- 38949129139
- F. V. Tikhonenko, D. W. Horsell, R. V. Gorbachev, A. K. Savchenko, Phys. Rev. Lett. 2008, 100, 056802.
- (2008) Phys. Rev. Lett. , vol.100 , pp. 056802
- Tikhonenko, F.V.¹ Horsell, D.W.² Gorbachev, R.V.³ Savchenko, A.K.⁴

31
- 40849106531
- D. W. Horsell, F. V. Tikhonenko, R. V. Gorbachev, A. K. Savchenko, Phil. Trans. R. Soc. A 2008, 366, 245.
- (2008) Phil. Trans. R. Soc. A , vol.366 , pp. 245
- Horsell, D.W.¹ Tikhonenko, F.V.² Gorbachev, R.V.³ Savchenko, A.K.⁴

32
- 79957494809
- Q. Yu, L. A. Jauregui, W. Wu, R. Colby, J. Tian, Z. Su, H. Cao, Z. Liu, D. Pandey, D. Wei, T. F. Chung, P. Peng, N. P. Guisinger, E. A. Stach, J. Bao, S.-S. Pei, Y. P. Chen, Nat. Mater. 2011, 10, 443.
- (2011) Nat. Mater. , vol.10 , pp. 443
- Yu, Q.¹ Jauregui, L.A.² Wu, W.³ Colby, R.⁴ Tian, J.⁵ Su, Z.⁶ Cao, H.⁷ Liu, Z.⁸ Pandey, D.⁹ Wei, D.¹⁰ Chung, T.F.¹¹ Peng, P.¹² Guisinger, N.P.¹³ Stach, E.A.¹⁴ Bao, J.¹⁵ Pei, S.-S.¹⁶ Chen, Y.P.¹⁷

33
- 7444220645
- K. S. Novoselov, A. K. Geim, S. V. Morozov, D. Jiang, Y. Zhang, S. V. Dubonos, I. V. Grigorieva, A. A. Firsov, Science 2004, 306, 666.
- (2004) Science , vol.306 , pp. 666
- Novoselov, K.S.¹ Geim, A.K.² Morozov, S.V.³ Jiang, D.⁴ Zhang, Y.⁵ Dubonos, S.V.⁶ Grigorieva, I.V.⁷ Firsov, A.A.⁸

34
- 43049170468
- K. I. Bolotin, K. J. Sikes, Z. Jianga, M. Klima, G. Fudenberg, J. Hone, P. Kim, H. L. Stormer, Solid State Commun. 2008, 146, 351.
- (2008) Solid State Commun. , vol.146 , pp. 351
- Bolotin, K.I.¹ Sikes, K.J.² Jianga, Z.³ Klima, M.⁴ Fudenberg, G.⁵ Hone, J.⁶ Kim, P.⁷ Stormer, H.L.⁸

35
- 84866327119
- A. S. Mayorov, D. C. Elias, I. S. Mukhin, S. V. Morozov, L. A. Ponomarenko, K. S. Novoselov, A. K. Geim, R. V. Gorbachev, Nano Lett. 2012, 12, 4629.
- (2012) Nano Lett. , vol.12 , pp. 4629
- Mayorov, A.S.¹ Elias, D.C.² Mukhin, I.S.³ Morozov, S.V.⁴ Ponomarenko, L.A.⁵ Novoselov, K.S.⁶ Geim, A.K.⁷ Gorbachev, R.V.⁸

36
- 77951026437
- M. Lafkioti, B. Krauss, T. Lohmann, U. Zschieschang, H. Klauk, K. v. Klitzing, J. H. Smet, Nano Lett. 2010, 10, 1149.
- (2010) Nano Lett. , vol.10 , pp. 1149
- Lafkioti, M.¹ Krauss, B.² Lohmann, T.³ Zschieschang, U.⁴ Klauk, H.⁵ Klitzing, K.V.⁶ Smet, J.H.⁷

37
- 77954742478
- X. Hong, K. Zou, J. Zhu, Phys. Rev. B 2009, 80, 241415(R).
- (2009) Phys. Rev. B , vol.80
- Hong, X.¹ Zou, K.² Zhu, J.³

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