메뉴 건너뛰기




Volumn 49, Issue 1, 2013, Pages 85-94

Effects of proximity on hardness and elastic modulus measurements of SiO2 and Cu by nanoindentation

Author keywords

Copper; Hardness; Nano tribology; Stress analysis

Indexed keywords

DUCTILE MATERIALS; FINITE ELEMENT METHOD SIMULATION; HARDNESS AND ELASTIC MODULUS; MEASUREMENTS OF; NANOINDENTATION BEHAVIOR; NANOINDENTATION TECHNIQUES;

EID: 84874483730     PISSN: 10238883     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11249-012-0050-5     Document Type: Article
Times cited : (19)

References (26)
  • 1
    • 0026875935 scopus 로고
    • An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments
    • 10.1557/JMR.1992.1564 1:CAS:528:DyaK38XktlWqtb4%3D
    • Oliver, W.; Pharr, G.: An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments. J. Mater. Res. 7, 1564-1583 (1992)
    • (1992) J. Mater. Res. , vol.7 , pp. 1564-1583
    • Oliver, W.1    Pharr, G.2
  • 4
    • 51649086421 scopus 로고    scopus 로고
    • Wear characteristics of microscopic bushings for MEMS applications investigated by an AFM
    • 10.1088/0960-1317/17/9/017 1:CAS:528:DC%2BD2sXht1Gis7fJ
    • Chung, K.; Jang, C.; Kim, D.: Wear characteristics of microscopic bushings for MEMS applications investigated by an AFM. J. Micromech. Microeng. 17, 1877-1887 (2007)
    • (2007) J. Micromech. Microeng. , vol.17 , pp. 1877-1887
    • Chung, K.1    Jang, C.2    Kim, D.3
  • 5
    • 77952560139 scopus 로고    scopus 로고
    • Continuous stiffness measurement during instrumented indentation testing
    • 10.1111/j.1747-1567.2010.00618.x
    • Hay, J.; Agee, P.; Herbert, E.: Continuous stiffness measurement during instrumented indentation testing. Exp. Technol. 34, 86-94 (2010)
    • (2010) Exp. Technol. , vol.34 , pp. 86-94
    • Hay, J.1    Agee, P.2    Herbert, E.3
  • 6
    • 73849124590 scopus 로고    scopus 로고
    • Depth-sensing indentation modeling for determination of elastic modulus of thin films
    • 10.1016/j.mechmat.2009.11.016
    • Tricoteaux, A.; Duarte, G.; Chicot, D.; Le Bourhis, E.; Bemporad, E.; Lesage, J.: Depth-sensing indentation modeling for determination of elastic modulus of thin films. Mech. Mater. 42, 166-174 (2010)
    • (2010) Mech. Mater. , vol.42 , pp. 166-174
    • Tricoteaux, A.1    Duarte, G.2    Chicot, D.3    Le Bourhis, E.4    Bemporad, E.5    Lesage, J.6
  • 7
    • 34748875311 scopus 로고    scopus 로고
    • A correction to the nanoindentation technique for ultrashallow indenting depths
    • DOI 10.1557/jmr.2007.0300
    • Yeo, C.; Polycarpou, A.: A correction to the nanoindentation technique for ultra shallow indenting depths. J. Mater. Res. 22, 2359-2362 (2007) (Pubitemid 47470921)
    • (2007) Journal of Materials Research , vol.22 , Issue.9 , pp. 2359-2362
    • Yeo, C.-D.1    Polycarpou, A.A.2
  • 8
    • 79955447320 scopus 로고    scopus 로고
    • Tip bluntness transition measured with atomic force microscopy and the effect on hardness variation with depth in silicon dioxide nanoindentation
    • 10.1007/s12541-011-0045-4
    • Choi, J.; Korach, C.: Tip bluntness transition measured with atomic force microscopy and the effect on hardness variation with depth in silicon dioxide nanoindentation. Int. J. Precis. Eng. Manuf. 12, 345-354 (2011)
    • (2011) Int. J. Precis. Eng. Manuf. , vol.12 , pp. 345-354
    • Choi, J.1    Korach, C.2
  • 9
    • 79957463321 scopus 로고    scopus 로고
    • Mechanical and tribological behavior of epoxy/silica nanocomposites at the micro/nano scale
    • 10.1007/s11249-011-9762-1
    • Wang, Z.; Gu, P.; Zhang, Z.; Gu, L.; Xu, Y.: Mechanical and tribological behavior of epoxy/silica nanocomposites at the micro/nano scale. Tribol. Lett. 42, 185-191 (2011)
    • (2011) Tribol. Lett. , vol.42 , pp. 185-191
    • Wang, Z.1    Gu, P.2    Zhang, Z.3    Gu, L.4    Xu, Y.5
  • 10
    • 33745802553 scopus 로고    scopus 로고
    • Nanoindentation of silica nanoparticles attached to a silicon substrate
    • DOI 10.1007/s11249-006-9079-7
    • Zou, M.; Yang, D.: Nanoindentation of silica nanoparticles attached to a silicon substrate. Tribol. Lett. 22, 189-196 (2006) (Pubitemid 44018873)
    • (2006) Tribology Letters , vol.22 , Issue.2 , pp. 189-196
    • Zou, M.1    Yang, D.2
  • 11
    • 81355123240 scopus 로고    scopus 로고
    • Hardness cartography to increase the nanoindentation resolution in heterogeneous materials: Application to a Ni-based single-crystal superalloy
    • 10.1016/j.scriptamat.2011.09.042 1:CAS:528:DC%2BC3MXhsVylu7%2FJ
    • Tromas, C.; Arnous, M.; Milhet, X.: Hardness cartography to increase the nanoindentation resolution in heterogeneous materials: application to a Ni-based single-crystal superalloy. Scripta. Mater. 66, 77-80 (2012)
    • (2012) Scripta. Mater. , vol.66 , pp. 77-80
    • Tromas, C.1    Arnous, M.2    Milhet, X.3
  • 12
    • 77953135262 scopus 로고    scopus 로고
    • Evaluation of the substrate effect on indentation behavior of film/substrate system
    • 10.1016/j.apsusc.2010.03.108 1:CAS:528:DC%2BC3cXmvFOksrw%3D
    • Wang, J.; Zheng, X.; Zheng, H.; Zhu, Z.; Song, S.: Evaluation of the substrate effect on indentation behavior of film/substrate system. Appl. Surf. Sci. 256, 5998-6002 (2010)
    • (2010) Appl. Surf. Sci. , vol.256 , pp. 5998-6002
    • Wang, J.1    Zheng, X.2    Zheng, H.3    Zhu, Z.4    Song, S.5
  • 13
    • 41149109661 scopus 로고    scopus 로고
    • Effect of substrate hardness and film structure on indentation depth criteria for film hardness testing
    • DOI 10.1088/0022-3727/41/7/074010, PII S0022372708568252
    • Manika, I.; Maniks, J.: Effect of substrate hardness and film structure on indentation depth criteria for film hardness testing. J. Phys. D. Appl. Phys. (2008). doi: 10.1088/0022-3727/41/7/074010 (Pubitemid 351430547)
    • (2008) Journal of Physics D: Applied Physics , vol.41 , Issue.7 , pp. 074010
    • Manika, I.1    Maniks, J.2
  • 15
    • 80053957252 scopus 로고    scopus 로고
    • Application of synchrotron X-ray diffraction and nanoindentation for the determination of residual stress fields around scratches
    • 10.1016/j.actamat.2011.08.034 1:CAS:528:DC%2BC3MXhsVWlurjK
    • Khan, M.; Fitzpatrick, M.; Hainsworth, S.; Evans, A.; Edwards, L.: Application of synchrotron X-ray diffraction and nanoindentation for the determination of residual stress fields around scratches. Acta Mater. 59, 7508-7520 (2011)
    • (2011) Acta Mater. , vol.59 , pp. 7508-7520
    • Khan, M.1    Fitzpatrick, M.2    Hainsworth, S.3    Evans, A.4    Edwards, L.5
  • 16
    • 0037670195 scopus 로고    scopus 로고
    • Measurement of residual-stress effect by nanoindentation on elastically strained (100) W
    • 10.1016/S1359-6462(03)00290-2 1:CAS:528:DC%2BD3sXkslKisLg%3D
    • Lee, Y.; Kwon, D.: Measurement of residual-stress effect by nanoindentation on elastically strained (100) W. Scripta Mater. 49, 459-465 (2003)
    • (2003) Scripta Mater. , vol.49 , pp. 459-465
    • Lee, Y.1    Kwon, D.2
  • 17
    • 85040956871 scopus 로고
    • Cambridge University New York
    • Johnson, K.: Contact Mechanics. Cambridge University, New York (1994)
    • (1994) Contact Mechanics
    • Johnson, K.1
  • 18
    • 0031077343 scopus 로고    scopus 로고
    • Elastic-plastic behaviour in materials loaded with a spherical indenter
    • 10.1023/A:1018552222072
    • Fisher-Cripps, A.: Elastic-plastic behaviour in materials loaded with a spherical indenter. J. Mater. Sci. 32, 727-736 (1997)
    • (1997) J. Mater. Sci. , vol.32 , pp. 727-736
    • Fisher-Cripps, A.1
  • 20
    • 33644693571 scopus 로고    scopus 로고
    • Critical review of analysis and interpretation of nanoindentation test data
    • DOI 10.1016/j.surfcoat.2005.03.018, PII S0257897205004639
    • Fisher-Cripps, A.: Critical review of analysis and interpretation of nanoindentation test data. Surf. Coat. Technol. 200, 4153-4165 (2006) (Pubitemid 43328993)
    • (2006) Surface and Coatings Technology , vol.200 , Issue.14-15 , pp. 4153-4165
    • Fischer-Cripps, A.C.1
  • 21
    • 3042606295 scopus 로고    scopus 로고
    • Measurement of hardness and elastic modulus by instrumented indentation: Advances in understanding and refinements to methodology
    • 10.1557/jmr.2004.19.1.3 1:CAS:528:DC%2BD2cXjtlOmtLg%3D
    • Oliver, W.; Pharr, G.: Measurement of hardness and elastic modulus by instrumented indentation: advances in understanding and refinements to methodology. J. Mater. Res. 19, 3-20 (2004)
    • (2004) J. Mater. Res. , vol.19 , pp. 3-20
    • Oliver, W.1    Pharr, G.2
  • 22
    • 4544352466 scopus 로고    scopus 로고
    • The nanoindentation behavior of hard and soft films on silicon substrates
    • 10.1016/j.tsf.2004.03.006 1:CAS:528:DC%2BD2cXntleitrk%3D
    • Beegan, D.; Chowdhury, S.; Laugier, M.: The nanoindentation behavior of hard and soft films on silicon substrates. Thin Solid Films 466, 167-174 (2004)
    • (2004) Thin Solid Films , vol.466 , pp. 167-174
    • Beegan, D.1    Chowdhury, S.2    Laugier, M.3
  • 23
    • 0242583240 scopus 로고    scopus 로고
    • A nanoindentation study of copper films on oxidised silicon substrates
    • DOI 10.1016/S0257-8972(03)00774-6
    • Beegan, D.; Chowdhury, S.; Laugier, M.: A nanoindentation study of copper films on oxidized silicon substrates. Surf. Coat. Technol. 176, 124-130 (2003) (Pubitemid 37388072)
    • (2003) Surface and Coatings Technology , vol.176 , Issue.1 , pp. 124-130
    • Beegan, D.1    Chowdhury, S.2    Laugier, M.T.3
  • 24
    • 77949578717 scopus 로고    scopus 로고
    • Estimations of work hardening exponents of engineering metals using residual indentation profiles of nano-indentation
    • 10.1007/s12206-009-1115-8
    • Kim, B.; Lee, C.; Lee, J.: Estimations of work hardening exponents of engineering metals using residual indentation profiles of nano-indentation. J. Mech. Sci. Tech. 24, 73-76 (2010)
    • (2010) J. Mech. Sci. Tech. , vol.24 , pp. 73-76
    • Kim, B.1    Lee, C.2    Lee, J.3
  • 25
    • 79961158531 scopus 로고    scopus 로고
    • Evaluation of friction coefficient using indentation model of Brinell hardness test for sheet metal forming
    • 10.1007/s12206-011-0134-4
    • Leu, D.: Evaluation of friction coefficient using indentation model of Brinell hardness test for sheet metal forming. J. Mech. Sci. Technol. 25, 1509-1517 (2011)
    • (2011) J. Mech. Sci. Technol. , vol.25 , pp. 1509-1517
    • Leu, D.1
  • 26
    • 10444248838 scopus 로고    scopus 로고
    • Modeling of nanoindentation of bulk and thin film by finite element method
    • DOI 10.1016/j.wear.2004.05.021, PII S0043164804002194
    • Bressan, J.; Tramontin, A.; Rosa, C.: Modeling of nanoindentation of bulk and thin film by finite element method. Wear 258, 115-122 (2005) (Pubitemid 39637585)
    • (2005) Wear , vol.258 , Issue.1-4 SPEC. ISSUE , pp. 115-122
    • Bressan, J.D.1    Tramontin, A.2    Rosa, C.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.