Nanoindentation of silica nanoparticles attached to a silicon substrate

Tribology Letters

Volumn 22, Issue 2, 2006, Pages 189-196

  Zou, M ^a   Yang, D ^b  

^a 3202 Bell Engineering Center   (United States)

^b Bruker Corporation   (United States)

Author keywords

Elastic modulus; Hardness; Nanoindentation; Nanomechanical properties; Nanoparticles

Indexed keywords

ANNEALING; INDENTATION; MECHANICAL PROPERTIES; PROBES; SCANNING ELECTRON MICROSCOPY; SILICON; SINGLE CRYSTALS; SPIN COATING; SUBSTRATES;

ENVIRONMENTAL SCANNING ELECTRON MICROSCOPY (ESEM); NANOINDENTATION TECHNIQUE; SCANNING PROBE MICROSCOPY (SPM); SILICA NANOPARTICLES; SINGLE CRYSTAL SILICON SUBSTRATE;

SILICA;

ANNEALING; INDENTATION; MECHANICAL PROPERTIES; PROBES; SCANNING ELECTRON MICROSCOPY; SILICA; SILICON; SINGLE CRYSTALS; SPIN COATING; SUBSTRATES;

EID: 33745802553     PISSN: 10238883     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11249-006-9079-7     Document Type: Article

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