메뉴 건너뛰기




Volumn 22, Issue 9, 2007, Pages 2359-2362

A correction to the nanoindentation technique for ultrashallow indenting depths

Author keywords

[No Author keywords available]

Indexed keywords

ELASTICITY; HARDNESS; LOADS (FORCES); MECHANICAL VARIABLES MEASUREMENT; QUARTZ;

EID: 34748875311     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/jmr.2007.0300     Document Type: Article
Times cited : (7)

References (16)
  • 2
    • 0031673020 scopus 로고    scopus 로고
    • Simulation of Berkovich nanoindentation experiments on thin films using finite element method
    • M. Lichinchi, C. Lenardi, J. Haugt, and K. Vitali: Simulation of Berkovich nanoindentation experiments on thin films using finite element method. Thin Solid Films 312, 240 (1998).
    • (1998) Thin Solid Films , vol.312 , pp. 240
    • Lichinchi, M.1    Lenardi, C.2    Haugt, J.3    Vitali, K.4
  • 3
    • 0036837403 scopus 로고    scopus 로고
    • Nanoindentation on diamond-like carbon and alumina coatings
    • Z. Xu and D. Rowcliffe: Nanoindentation on diamond-like carbon and alumina coatings. Surf. Coat. Technol. 161, 44 (2002).
    • (2002) Surf. Coat. Technol , vol.161 , pp. 44
    • Xu, Z.1    Rowcliffe, D.2
  • 4
    • 33847607367 scopus 로고    scopus 로고
    • Nanomechanical properties of sub-10 nm carbon film overcoats using the nanoindentation technique
    • C-D. Yeo, A.A. Polycarpou, J.D. Kiely, and Y-T. Hsia: Nanomechanical properties of sub-10 nm carbon film overcoats using the nanoindentation technique. J. Mater. Res. 22, 141 (2007).
    • (2007) J. Mater. Res , vol.22 , pp. 141
    • Yeo, C.-D.1    Polycarpou, A.A.2    Kiely, J.D.3    Hsia, Y.-T.4
  • 5
    • 0026875935 scopus 로고
    • An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments
    • W.C. Oliver and G.M. Pharr: An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments. J. Mater. Res. 7, 1564 (1992).
    • (1992) J. Mater. Res , vol.7 , pp. 1564
    • Oliver, W.C.1    Pharr, G.M.2
  • 6
    • 0346089952 scopus 로고    scopus 로고
    • Preparation of carbon nitride thin films by ion-beam-assisted deposition and their mechanical properties
    • M. Kohzaki, A. Matsumuro, T. Hayashi, M. Muramatsu, and K. Yamaguchi: Preparation of carbon nitride thin films by ion-beam-assisted deposition and their mechanical properties. Thin Solid Films 308-309, 239 (1997).
    • (1997) Thin Solid Films , vol.308-309 , pp. 239
    • Kohzaki, M.1    Matsumuro, A.2    Hayashi, T.3    Muramatsu, M.4    Yamaguchi, K.5
  • 7
    • 0000437182 scopus 로고    scopus 로고
    • Nanowear/nanomechanical testing and the role of stress in sputtered CNx overcoats
    • T.W. Scharf, H. Deng, and J.A. Barnard: Nanowear/nanomechanical testing and the role of stress in sputtered CNx overcoats. J. Appl. Phys. 81(8), 5393 (1997).
    • (1997) J. Appl. Phys , vol.81 , Issue.8 , pp. 5393
    • Scharf, T.W.1    Deng, H.2    Barnard, J.A.3
  • 8
    • 0011713787 scopus 로고
    • The relation between load and penetration in the axisymmetric Boussinesq problem for a punch of arbitrary profile
    • I.N. Sneddon: The relation between load and penetration in the axisymmetric Boussinesq problem for a punch of arbitrary profile. Int. J. Eng. Sci. 3, 47 (1965).
    • (1965) Int. J. Eng. Sci , vol.3 , pp. 47
    • Sneddon, I.N.1
  • 10
    • 36149067964 scopus 로고
    • Elastic recovery of conical indentation
    • N.A. Stilwell and D. Tabor: Elastic recovery of conical indentation. Phys. Proc. Soc. 78, 169 (1961).
    • (1961) Phys. Proc. Soc , vol.78 , pp. 169
    • Stilwell, N.A.1    Tabor, D.2
  • 11
    • 0000810597 scopus 로고    scopus 로고
    • Relationships between hardness, elastic modulus, and the work of indentation
    • Y. Cheng and C. Cheng: Relationships between hardness, elastic modulus, and the work of indentation. Appl. Phys. Lett. 73(5), 614 (1998).
    • (1998) Appl. Phys. Lett , vol.73 , Issue.5 , pp. 614
    • Cheng, Y.1    Cheng, C.2
  • 12
    • 0000286911 scopus 로고    scopus 로고
    • Scaling approach to conical indentation in elastic-plastic solids with work hardening
    • Y. Cheng and C. Cheng: Scaling approach to conical indentation in elastic-plastic solids with work hardening. J. Appl. Phys. 84, 1284 (1998).
    • (1998) J. Appl. Phys , vol.84 , pp. 1284
    • Cheng, Y.1    Cheng, C.2
  • 13
    • 0035868034 scopus 로고    scopus 로고
    • On the application of the work-of-indentation approach to depth-sensing indentation experiments in coated systems
    • J.R. Tuck, A.M. Korsunsky, S.J. Bull, and R.I. Davison: On the application of the work-of-indentation approach to depth-sensing indentation experiments in coated systems. Surf. Coat. Technol. 137, 217 (2001).
    • (2001) Surf. Coat. Technol , vol.137 , pp. 217
    • Tuck, J.R.1    Korsunsky, A.M.2    Bull, S.J.3    Davison, R.I.4
  • 14
    • 0032632572 scopus 로고    scopus 로고
    • Determination of elastoplastic properties by instrumented sharp indentation
    • A.E. Giannakopoulos and S. Suresh: Determination of elastoplastic properties by instrumented sharp indentation. Scripta Mater. 40(10), 1191 (1999).
    • (1999) Scripta Mater , vol.40 , Issue.10 , pp. 1191
    • Giannakopoulos, A.E.1    Suresh, S.2
  • 15
    • 17644417090 scopus 로고    scopus 로고
    • High-resolution capacitive load-displacement transducer and its application in nanoindentation and adhesion force measurements
    • N. Yu, W.A. Bonin, and A.A. Polycarpou: High-resolution capacitive load-displacement transducer and its application in nanoindentation and adhesion force measurements. Rev. Sci. Instrum. 76, 045109 (2005).
    • (2005) Rev. Sci. Instrum , vol.76 , pp. 045109
    • Yu, N.1    Bonin, W.A.2    Polycarpou, A.A.3
  • 16
    • 2342636422 scopus 로고    scopus 로고
    • Use of the focused ion beam technique to produce a sharp spherical diamond indenter for sub-10 nm nanoindentation measurements
    • N. Yu and A.A. Polycarpou: Use of the focused ion beam technique to produce a sharp spherical diamond indenter for sub-10 nm nanoindentation measurements. J. Vac. Sci. Technol., B 22, 668 (2004).
    • (2004) J. Vac. Sci. Technol., B , vol.22 , pp. 668
    • Yu, N.1    Polycarpou, A.A.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.