Evaluation of the substrate effect on indentation behavior of film/substrate system

Applied Surface Science

Volumn 256, Issue 20, 2010, Pages 5998-6002

  Wang, J S ^a   Zheng, X J ^a   Zheng, H ^a   Zhu, Z ^a   Song, S T ^a  

^a XIANGTAN UNIVERSITY   (China)

Author keywords

Dimensionless analysis; Finite element method; Nanoindentation; Substrate effect

Indexed keywords

CURVE FITTING; FINITE ELEMENT METHOD; FUNCTION EVALUATION; NANOINDENTATION; THIN FILMS;

DIMENSIONLESS ANALYSIS; FILM/SUBSTRATE; FITTING PARAMETERS; INDENTATION BEHAVIOR; INDENTATION DEPTH; LOADING CURVES; POWER FUNCTIONS; SUBSTRATE EFFECTS;

LOADING;

EID: 77953135262     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2010.03.108     Document Type: Article

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