Depth-sensing indentation modeling for determination of Elastic modulus of thin films

Mechanics of Materials

Volumn 42, Issue 2, 2010, Pages 166-174

  Tricoteaux, A ^a,b   Duarte, G ^b   Chicot, D ^b   Le Bourhis, E ^c   Bemporad, E ^d   Lesage, J ^b  

^a Université de Valenciennes et du Hainaut Cambrésis   (France)

^b LABORATOIRE DE MÉCANIQUE DE LILLE   (France)

^c UNIVERSITÉ DE POITIERS   (France)

^d ROMA TRE UNIVERSITY   (Italy)

Author keywords

Depth sensing indentation; Elastic modulus; Model; Nanoindentation; Thin films; TiCN

Indexed keywords

CALCULATED VALUES; DEFORMATION PROCESS; DEPTH-SENSING INDENTATION; INDENTATION TEST; INDENTERS; MICRO-INDENTATION TESTS; NANOINDENTATION TESTS; NANOINDENTATION THIN FILMS; NEW MODEL;

DEFORMATION; NANOINDENTATION; THIN FILMS; VICKERS HARDNESS TESTING;

ELASTIC MODULI;

EID: 73849124590     PISSN: 01676636     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mechmat.2009.11.016     Document Type: Article

References (29)

1. Abbes, F., Meza, J., Troyon, M., 2008. Influence du rayon de courbure de l'indenteur et de la profondeur de pénétration sur le facteur de correction β lors de mesures par nano-indentation, Colloque Indentation, Rennes, France, October 7-8.
2. Antunes J.M., Menezes L.F., and Fernandes J.V. Three-dimensional numerical simulation of Vickers indentation tests. International Journal of Solids and Structures 43 3-4 (2006) 784-806
3. Antunes J.M., Fernandes J.V., Sakharova N.A., Oliviera M.C., and Menezes L.F. On the determination of the Young's modulus of thin films using indentation tests. International Journal of Solids and Structures 44 25-26 (2007) 8313-8334
4. Batista J.C.A., Godoy C., Pintaúde G., Sinatora A., and Matthews A. An approach to elucidate the different response of PVD coatings in different tribological tests. Surface and Coatings Technology 174-175 (2003) 891-898
5. Bull S.J., Bhat D.G., and Staia M.H. Properties and performance of commercial TiCN coatings. Part 1: coating architecture and hardness modelling. Surface and Coatings Technology 163-164 (2003) 499-506
6. Cai X., and Bangert H. Hardness measurements of thin films-determining the critical ratio of depth to thickness using FEM. Thin Solid Films 264 1 (1995) 59-71
7. Chicot D., and Mercier D. Improvement in depth-sensing indentation to calculate the universal hardness on the entire loading curve. Mechanics of Materials 40 4-5 (2007) 171-182
8. Chudoba T., Schwarzer N., and Richter F. Steps towards a mechanical modeling of layered systems. Surface and Coatings Technology 154 2-3 (2002) 140-151
9. Cleymand F., Ferry O., Kouitat R., Billard A., and von Stebut J. Influence of indentation depth on the determination of the apparent Young's modulus of bi-layer material: experiments and numerical simulation. Surface and Coatings Technology 200 1-4 (2005) 890-893
10. Dao M., Chollacoop N., Van Vliet K.J., Venkatesh T.A., and Suresh S. Computational modeling of the forward reverse problems in instrumented sharp indentation. Acta Materialia 49 19 (2001) 3899-3918
11. Doerner M.F., and Nix W.D. A method for interpreting the data from depth-sensing indentation instruments. Journal of Materials Research 1 4 (1986) 601-609
12. Fang T.H., Jian S.R., and Chuu D.S. Nanomechanical properties of TiC, TiN and TiCN thin films using scanning probe microscopy and nanoindentation. Applied Surface Science 228 (2004) 365-372
13. Fischer-Cripps, A.C., 2004. Nano-indentation, second ed., vol. 6. Springer Ed., pp. 85-86.
14. Fischer-Cripps A.C. Critical review of analysis and interpretation of nano-indentation test data. Surface and Coating Technology 200 (2006) 4153-4165
15. Field J.E., and Telling R.H. The elastic modulus and Poisson ratio of diamond (1999), Research Note, Cavendish Laboratory, Cambridge
16. Gao H., Chiu C.H., and Lee J. Elastic contact versus indentation modeling of multi-layered materials. International Journal of Solids and Structures 29 20 (1992) 2471-2492
17. Hay J.C., Bolshakov A., and Pharr G.M. Critical examination of the fundamental relations used in the analysis of nano-indentation data. Journal of Materials Research 14 6 (1999) 2296-2305
18. Hay, J.L., Pharr, G.M., 2000. Instrumented Indentation Testing, ASM Handbook, vol. 08: Mechanical Testing and Evaluation.
19. Jiang W.G., Su J.J., and Feng X.Q. Effect of surface roughness on nano-indentation test of thin films. Engineering Fracture Mechanics 75 17 (2008) 4965-4972
20. 1-x (0 ≤ x ≤ 1) films. Surface and Coatings Technology 126 (2000) 1-14
21. 1-x (x = 0, 0.15, 0.45) thin films deposited by arc evaporation. Thin Solid Films 371 (2000) 167-177
22. King R.B. Elastic analysis of some punch problems for layered medium. International Journal of Solids and Structures 23 12 (1987) 1657-1664
23. Korsunsky A.M., McGurk M.R., Bull S.J., and Page T.F. On the hardness of coated systems. Surface and Coatings Technology 99 (1998) 171-183
24. Leyland A., and Matthews A. On the significance of the H/i ratio in wear control: a nanocomposite coating approach to optimised tribological behaviour. Wear 246 1-2 (2000) 1-11
25. Mencik J., Munz D., Quandt E., Weppelmann E.R., and Swain M.V. Determination of elastic modulus of thin layer using nano-indentation. Journal of Materials Research 12 9 (1997) 2475-2484
26. Oliver W.C., and Pharr G.M. An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments. Journal of Materials Research 7 6 (1992) 1564-1583
27. Sun Y., Bell T., and Zheng S. Finite element analysis of the critical ratio of coating thickness to indentation depth for coating property measurements by nano-indentation. Thin Solid Films 258 1-2 (1995) 198-204
28. Tricoteaux A., Puchi-Cabrera E.S., and Lesage J. Method for fast determination of thin films hardness from standard micro-indentation tests. Surface Engineering 23 1 (2007) 40-44
29. Troyon M., and Huang L. Comparison of different analysis methods in nano-indentation and influence on the correction factor for contact area. Surface and Coatings Technology 201 (2006) 1613-1619