Fabrication and characterization of a polymeric microcantilever with an encapsulated hotwire CVD polysilicon piezoresistor

Journal of Microelectromechanical Systems

Volumn 18, Issue 1, 2009, Pages 79-87

  Kale, Nitin S ^a   Nag, Sudip ^a   Pinto, Richard ^a   Rao, V Ramgopal ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY BOMBAY   (India)

Author keywords

Affinity cantilevers; Bio microelectromechanical system (bio MEMS); Hotwire CVD (HWCVD); Piezoresistive sensing; Polymeric cantilevers; Surface stress

Indexed keywords

ADSORPTION; ATOMIC FORCE MICROSCOPY; COMPOSITE MICROMECHANICS; ELECTROMECHANICAL DEVICES; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROMECHANICS; NANOCANTILEVERS; ORGANIC POLYMERS; PHOTORESISTS; POLYSILICON; STRESSES; SURFACE PROPERTIES;

AFFINITY CANTILEVERS; BIO-MICROELECTROMECHANICAL SYSTEM (BIO-MEMS); HOTWIRE CVD (HWCVD); PIEZORESISTIVE SENSING; POLYMERIC CANTILEVERS; SURFACE STRESS;

CHEMICAL VAPOR DEPOSITION;

EID: 60449114768     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2008.2008577     Document Type: Article

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