Organic CantiFET: A nanomechanical polymer cantilever sensor with integrated OFET

Journal of Microelectromechanical Systems

Volumn 21, Issue 2, 2012, Pages 294-301

  Seena, V ^a   Nigam, Akash ^b   Pant, Prita ^a   Mukherji, Soumyo ^a   Rao, V Ramgopal ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY BOMBAY   (India)

^b IITB MONASH RESEARCH ACADEMY   (India)

Author keywords

Nanomechanical cantilever; organic CantiFET; pentacene organic field effect transistor (OFET); polymer microcantilever; SU 8; SU 8 dielectric

Indexed keywords

BIO-CHEMICAL SENSOR; LOW NOISE; MICRO-CANTILEVERS; NANO-MECHANICAL CANTILEVER; NANOMECHANICAL MOTION; ORGANIC CANTIFET; POLYMER CANTILEVERS; POLYMER MATERIALS; SENSOR PLATFORM; SU-8; SURFACE STRESS; ULTRASENSITIVE;

BACTERIOPHAGES; CHEMICAL SENSORS; NANOCANTILEVERS; ORGANIC FIELD EFFECT TRANSISTORS; SURFACE PROPERTIES;

POLYMERS;

EID: 84859701457     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2011.2175703     Document Type: Article

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