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Volumn 3, Issue 5, 2012, Pages 410-414

The influence of substrate temperature on the structure, morphology, and optical properties of ZrO2 thin films prepared by e-beam evaporation

Author keywords

Atomic force microscope; e beam evaporation method; Optical properties; Substrate temperature; X ray diffraction; Zirconium dioxide thin film

Indexed keywords


EID: 84873872343     PISSN: 09763961     EISSN: 0976397X     Source Type: Journal    
DOI: 10.5185/amlett.2012.5364     Document Type: Article
Times cited : (12)

References (17)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.