Annealing and doping effects on structure and optical properties of sol-gel derived ZrO 2 thin films

Applied Surface Science

Volumn 191, Issue 1-4, 2002, Pages 181-187

  Liu, Wen Chao ^a   Wu, Di ^a   Li, Ai Dong ^a   Ling, Hui Qing ^a   Tang, Yue Feng ^a   Ming, Nai Ben ^a  

^a NANJING UNIVERSITY   (China)

Author keywords

CFA; Rare earth elements doping; RTA; Sol gel; ZrO 2

Indexed keywords

CRYSTALLINE MATERIALS; DOPING (ADDITIVES); HEAT TREATMENT; RAPID THERMAL ANNEALING; REFRACTIVE INDEX; SOL-GELS; X RAY DIFFRACTION ANALYSIS; ZIRCONIA;

CONVENTIONAL FURNACE ANNEALING (CFA);

THIN FILMS;

EID: 0037123528     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(02)00177-0     Document Type: Article

References (10)