Optical and structural study of EB-PVD ZrO2 thin films

Vacuum

Volumn 81, Issue 11-12, 2007, Pages 1484-1488

  Ochando, I M ^a   Vila, M ^a   Prieto, C ^a  

^a INSTITUTO DE CIENCIA DE MATERIALES DE MADRID   (Spain)

Author keywords

EB PVD zirconia thin films

Indexed keywords

CRYSTALLITE SIZE; DEPOSITION; ELECTRON BEAMS; PHYSICAL VAPOR DEPOSITION; REFRACTIVE INDEX; YTTRIA STABILIZED ZIRCONIA;

DEPOSITION RATE; MONOCLINIC POWDERS;

THIN FILMS;

EID: 34547873156     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2007.04.015     Document Type: Article

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