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Volumn 45, Issue 1, 2013, Pages 65-67

Temperature effects of sputtering of Langmuir-Blodgett multilayers

Author keywords

cluster ion beam; depth profiling; TOF SIMS; wedge beveling

Indexed keywords

ALTERED LAYER; BARIUM ARACHIDATE; CHEMICAL DAMAGES; CLUSTER ION BEAMS; DEPTH PROFILE; DEPTH RESOLUTION; EROSION RATES; INITIAL VALUES; LANGMUIR BLODGETT TECHNIQUES; LANGMUIR-BLODGETT MULTILAYERS; ORGANIC THIN FILMS; SAMPLE COOLING; TIME OF FLIGHT SECONDARY ION MASS SPECTROMETRY; TOF SIMS; WEDGE BEVELING;

EID: 84872854489     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.5082     Document Type: Conference Paper
Times cited : (2)

References (20)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.