Damage profiles of Si (001) surface via Ar cluster beam sputtering

Surface and Interface Analysis

Volumn 45, Issue 1, 2013, Pages 150-153

  Kyoung, Yong Koo ^a   Lee, Hyung Ik ^a   Chung, Jae Gwan ^a   Heo, Sung ^a   Lee, Jae Cheol ^a   Cho, Young Joon ^b   Kang, Hee Jae ^b  

^a Samsung Advanced Institute of Technology (SAIT)   (South Korea)

^b Chungbuk National University   (South Korea)

Author keywords

Ar cluster ion beam; MEIS; sputtering; surface damage; XPS

Indexed keywords

AR ATOM; AR ION SPUTTERING; ARGON GAS; ARGON ION BEAM; CLUSTER BEAMS; CLUSTER ION BEAMS; DAMAGE PROCESS; DAMAGE PROFILES; DAMAGED LAYERS; ION-BEAM SPUTTERING; MEDIUM ENERGY ION SCATTERING; MEIS; SI SUBSTRATES; SI(0 0 1); SI(001) SURFACES; SURFACE DAMAGES;

ATOMS; SILICON; SPUTTERING; SURFACE ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

ARGON;

EID: 84872847776     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.4917     Document Type: Conference Paper

References (16)

1. K. Wittmaack, Surf. Interface Anal. 2000, 29, 721.
2. H. I. Lee, H. J. Kang, D. W. Moon, J. Appl. Phys. 2006, 99, 123507.
3. A. Merkulove, P. Peres, S. Choi, H.-U. Ehrke, N. Loibo, M. Schuhmacher, J. Vac. Sci. Technol., B 2010, 28, C1C48.
4. A. Wucher, J. Cheng, N. Winograd, J. Phys. Chem. C 2008, 112, 16550.
5. N. Sanada, A. Yamamoto, R. Oiwa, Y. Oshima, Surf. Interface Anal. 2004, 36, 280.
6. K. Tanaka, N. Sanada, M. Hikida, T. Nakaamure, T. Kajiyama, A. Takahara, Appl. Surf. Sci. 2008, 254, 5435.
7. N. Toyota, J. Matsuo, T. Aoki, I. Yamada, D. B. Fenner, Nucl. Instrum. Methods Phys. Res., Sect. B 2002, 190, 860.
8. S. Ninomiya, K. Ichiki, H. Yamada, Y. Nakata, T. Seki, T. Aoki, J. Matsuo, Rapid Commun. Mass Spectrom. 2009, 23, 1601.
9. T. Miyayama, N. Sanada, M. Suzuki, J. S. Hammond, S.-Q. D. Si, A. Takahara, J. Vac. Sci. Technol. A 2010, 28, L1.
10. T. Miyayama, N. Sanada, S. R. Bryan, J. S. Hammond, M. Suzuki, Surf. Interface Anal. 2010, 42, 1453.
11. J. C. Lee, C. S. Chung, H. J. Kang, Y.P. Kim, H. K. Kim, D. W. Moon, J. Vac. Sci. Technol., A. 1995, 13, 1325.
12. S. Kakuta, S. Sasaki, K. Furusawa, T. Seki, A. Aoki, J. Matsuo, Surf. Coat.Technol. 2007, 201, 8632.
13. T. Aoki, J. Matsuo, G. Takaoka, Nucl. Instrum. Methods Phys. Res., Sect. B 2003, 202, 278.
14. T. Aoki, T. Seki, J. Matsuo, Vacuum 2010, 84, 994.
15. D. W. Oh, S. K. Oh, H. J. Kang, H. I. Lee, D. W. Moon, Nucl. Instrum. Methods Phys. Res., Sect. B 2002, 190, 598.
16. H. I. Lee, H. K. Kim, K. J. Kim, D. W. Moon, H. K. Shon, H. C. Shin, H. J. Kang, Surf. Interface Anal. 2004, 36, 259.