Low damage smoothing of magnetic materials using off-normal gas cluster ion beam irradiation

Surface and Coatings Technology

Volumn 201, Issue 19-20 SPEC. ISS., 2007, Pages 8632-8636

  Kakuta, S ^a,b   Sasaki, S ^a,b   Furusawa, K ^a,b   Seki, T ^b,c   Aoki, T ^b,c   Matsuo, J ^c  

^a HITACHI LTD   (Japan)

^b Collaborative Research Center of Advanced Quantum Beam Process Technology ^*  (Japan)

^c KYOTO UNIVERSITY   (Japan)

Author keywords

Gas cluster; Low damage smoothing; Magnetic materials; Off normal irradiation

Indexed keywords

GAS CLUSTER; OFF-NORMAL IRRADIATION; SMOOTHING;

ION BEAMS; ION BOMBARDMENT; SURFACE MORPHOLOGY; SURFACE ROUGHNESS; SURFACE TREATMENT;

MAGNETIC MATERIALS;

ION BEAMS; ION BOMBARDMENT; MAGNETIC MATERIALS; SURFACE MORPHOLOGY; SURFACE ROUGHNESS; SURFACE TREATMENT;

EID: 34447509550     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.03.064     Document Type: Article

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