Ternary and quarternary TiSiN and TiSiCN nanocomposite coatings obtained by Chemical Vapor Deposition

Surface and Coatings Technology

Volumn 215, Issue , 2013, Pages 133-140

  Endler, Ingolf ^a   Hohn M ^a   Schmidt, J ^a   Scholz, S ^a   Herrmann, M ^a   Knaut, M ^b  

^a FRAUNHOFER INSTITUTE FOR CERAMIC TECHNOLOGIES AND SYSTEMS   (Germany)

^b DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

CVD; Hard coating; Nanocomposite layer; TiSiCN; TiSiN

Indexed keywords

CEMENTED CARBIDE SUBSTRATES; CRITICAL LOAD; CRYSTALLINE PHASIS; CVD COATING; HARD METAL SUBSTRATE; LOW PRESSURE CVD; MAXIMUM HARDNESS; NANO-COMPOSITE COATING; NANO-COMPOSITE LAYERS; NANO-COMPOSITE STRUCTURE; NANOCRYSTALLINES; OXIDATION BEHAVIORS; QUARTER-NARY; SCRATCH TEST; SILICON CONTENTS; TIO; TISICN; TISIN;

ACETONITRILE; CHEMICAL VAPOR DEPOSITION; COBALT; HARDNESS; INORGANIC COATINGS; NANOCOMPOSITES; SILICON; SILICON CARBIDE; SILICON NITRIDE; SUBSTRATES; TITANIUM CARBIDE; TITANIUM DIOXIDE; TITANIUM NITRIDE;

HARD COATINGS;

EID: 84872686255     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2012.10.067     Document Type: Article

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