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Volumn 201, Issue 3-4, 2006, Pages 1576-1582
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Influence of different interlayers and bias voltage on the properties of a-C:H and a-C:H:Me coatings prepared by reactive d.c. magnetron sputtering
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Author keywords
Adhesion; Diamond like carbon; Hardness; Magnetron sputtering; Structural properties; Wear
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Indexed keywords
ADHESION;
AMORPHOUS FILMS;
CRACK PROPAGATION;
FRICTION;
HARDNESS;
INORGANIC COATINGS;
MAGNETRON SPUTTERING;
WEAR RESISTANCE;
BIAS VOLTAGE;
INTERLAYERS;
STRUCTURAL PROPERTIES;
DIAMOND LIKE CARBON FILMS;
ADHESION;
AMORPHOUS FILMS;
CRACK PROPAGATION;
DIAMOND LIKE CARBON FILMS;
FRICTION;
HARDNESS;
INORGANIC COATINGS;
MAGNETRON SPUTTERING;
WEAR RESISTANCE;
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EID: 33748573312
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/j.surfcoat.2006.02.027 Document Type: Article |
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Times cited : (43)
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References (13)
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