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Journal of Ceramic Processing Research

Volumn 12, Issue 2, 2011, Pages 187-190

The mechanical and structural properties of Si doped diamond-like carbon prepared by reactive sputtering

(2) Er, Kyoung Hoon b So, Myoung Gi a

a Kangwon National University (South Korea)

b Chuncheon Campus of Korea Polytechnic III ^* (South Korea)

Author keywords

Deposition; Microstructure; Reactive sputtering; Si DLC; Thin films

Indexed keywords

EID: 79960973836 PISSN: 12299162 EISSN: None Source Type: Journal
DOI: None Document Type: Article

Times cited : (10)

References (13)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.