Tribochemical reaction of hydrogenated diamond-like carbon films: A clue to understand the environmental dependence

Tribology International

Volumn 37, Issue 11-12 SPEC.ISS., 2004, Pages 913-921

  Park, Se Jun ^a,b   Lee, Kwang Ryeol ^a   Ko, Dae Hong ^b  

^a Korea Institute of Science and Technology   (South Korea)

^b Yonsei University   (South Korea)

Author keywords

Counterface materials; Diamond like carbon; Fe rich oxide debris; Humidity dependence; Tribochemical reaction

Indexed keywords

AGGLOMERATION; ATMOSPHERIC HUMIDITY; CONCENTRATION (PROCESS); DEPOSITION; HYDROGENATION; OXIDATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON WAFERS;

COUNTERFACE MATERIALS; DIAMOND-LIKE CARBON (DLC); FE RICH OXIDE DEBRIS; HUMIDITY DEPENDENCE; TRIBOCHEMICAL REACTIONS;

DIAMONDS;

EID: 7644232159     PISSN: 0301679X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.triboint.2004.07.008     Document Type: Article

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