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Volumn 517, Issue 3, 2008, Pages 1115-1119
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Thermal stability of UBM sputtered DLC coatings with various hydrogen contents
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Author keywords
DLC; Hydrogen; Sputter; Thermal stability; UBM
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Indexed keywords
AMORPHOUS CARBON;
CARBON;
CARBON FILMS;
DIAMONDS;
ELECTRIC LOAD MANAGEMENT;
HYDROGEN;
HYDROGENATION;
HYDROGENOLYSIS;
NONMETALS;
THERMODYNAMIC STABILITY;
BAND SPLITTING;
DIAMOND-LIKE CARBONS;
DLC;
DLC COATINGS;
HYDROGEN CONTENTS;
HYDROGEN EFFUSIONS;
HYDROGENATED AMORPHOUS CARBONS;
HYDROGENATED FILMS;
IN VACUUMS;
INDENTATION MEASUREMENTS;
STRUCTURAL CHANGES;
TETRAHEDRAL AMORPHOUS CARBONS;
THERMAL STABILITIES;
THERMAL STABILITY;
TRIBOLOGICAL PROPERTIES;
UBM;
AMORPHOUS FILMS;
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EID: 56649088158
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/j.tsf.2008.08.163 Document Type: Article |
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Times cited : (28)
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References (7)
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