Growth regimes of porous gold thin films deposited by magnetron sputtering at oblique incidence: From compact to columnar microstructures

Nanotechnology

Volumn 24, Issue 4, 2013, Pages

  Alvarez, R ^a   Garcia Martin J M ^b   MacIas Montero M ^a   Gonzalez Garcia, L ^a   Gonzalez J C ^a   Rico, V ^a   Perlich, J ^c   Cotrino, J ^a,d   Gonzalez Elipe A R ^a   Palmero, A ^a  

^a INSTITUTO DE CIENCIA DE MATERIALES DE SEVILLA   (Spain)

^b INSTITUTO DE MICROELECTRÓNICA DE MADRID   (Spain)

^c DESY   (Germany)

^d UNIVERSITY OF SEVILLE   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

BACKGROUND PRESSURE; COLUMNAR MICROSTRUCTURES; EXPERIMENTAL CONDITIONS; FIELD EMISSION SCANNING ELECTRON MICROSCOPY; GEOMETRICAL PATTERNS; GOLD THIN FILMS; GRAZING INCIDENCE SMALL-ANGLE X-RAY SCATTERING; GROWTH MODELS; GROWTH REGIME; LOW TEMPERATURES; MORPHOLOGICAL FEATURES; OBLIQUE ANGLES; OBLIQUE INCIDENCE; POROUS GOLD; SUBSTRATE TILTS;

DEPOSITS; FIELD EMISSION MICROSCOPES; GOLD; ISOMERS; MAGNETRON SPUTTERING; PHASE DIAGRAMS; SOLVENTS; THIN FILMS;

MICROSTRUCTURE;

GOLD; METAL NANOPARTICLE;

ARTICLE; ARTIFICIAL MEMBRANE; CHEMICAL MODEL; CHEMICAL STRUCTURE; CHEMISTRY; COMPUTER SIMULATION; CONFORMATION; CRYSTALLIZATION; HEAT; MACROMOLECULE; MAGNETIC FIELD; MATERIALS TESTING; METHODOLOGY; PARTICLE SIZE; POROSITY; SURFACE PROPERTY; ULTRASTRUCTURE;

COMPUTER SIMULATION; CRYSTALLIZATION; GOLD; HOT TEMPERATURE; MACROMOLECULAR SUBSTANCES; MAGNETIC FIELDS; MATERIALS TESTING; MEMBRANES, ARTIFICIAL; METAL NANOPARTICLES; MODELS, CHEMICAL; MODELS, MOLECULAR; MOLECULAR CONFORMATION; PARTICLE SIZE; POROSITY; SURFACE PROPERTIES;

MLCS; MLOWN;

EID: 84872135406     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/24/4/045604     Document Type: Article

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