SCOPUS 정보 검색 플랫폼

Volumn 101, Issue 25, 2012, Pages

Fatigue properties of atomic-layer-deposited alumina ultra-barriers and their implications for the reliability of flexible organic electronics

(2) Baumert, E K a Pierron, O N a

a GEORGIA INSTITUTE OF TECHNOLOGY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC LAYER DEPOSITED; CONTROLLED ENVIRONMENT; CYCLIC LOADINGS; FATIGUE DEGRADATION; FATIGUE PROPERTIES; FINITE ELEMENT MODELS; FLEXIBLE ORGANIC ELECTRONICS; FREQUENCY EVOLUTION; MICRO RESONATORS; STRAIN AMPLITUDE;

ALUMINA; CRACKS; FINITE ELEMENT METHOD; NATURAL FREQUENCIES; SCANNING ELECTRON MICROSCOPY;

DEPOSITS;

EID: 84871814477 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.4772471 Document Type: Article

Times cited : (17)

References (32)

1
- 84863646260
- 10.1116/1.4729447
- P. F. Carcia, R. S. McLean, Z. G. Li, M. H. Reilly, and W. J. Marshall, J. Vac. Sci. Technol. A 30 (4), 5 (2012). 10.1116/1.4729447
- (2012) J. Vac. Sci. Technol. A , vol.30 , Issue.4 , pp. 5
- Carcia, P.F.¹ McLean, R.S.² Li, Z.G.³ Reilly, M.H.⁴ Marshall, W.J.⁵

2
- 78650645436
- 10.1063/1.3519476
- P. F. Carcia, R. S. McLean, and M. H. Reilly, Appl. Phys. Lett. 97 (22), 221901 (2010). 10.1063/1.3519476
- (2010) Appl. Phys. Lett. , vol.97 , Issue.22 , pp. 221901
- Carcia, P.F.¹ McLean, R.S.² Reilly, M.H.³

3
- 33746306730
- 10.1063/1.2221912
- P. F. Carcia, R. S. McLean, M. H. Reilly, M. D. Groner, and S. M. George, Appl. Phys. Lett. 89 (3), 031915 (2006). 10.1063/1.2221912
- (2006) Appl. Phys. Lett. , vol.89 , Issue.3 , pp. 031915
- Carcia, P.F.¹ McLean, R.S.² Reilly, M.H.³ Groner, M.D.⁴ George, S.M.⁵

4
- 47049095504
- 10.1021/jp076866+
- A. A. Dameron, S. D. Davidson, B. B. Burton, P. F. Carcia, R. S. McLean, and S. M. George, J. Phys. Chem. C 112 (12), 4573-4580 (2008). 10.1021/jp076866+
- (2008) J. Phys. Chem. C , vol.112 , Issue.12 , pp. 4573-4580
- Dameron, A.A.¹ Davidson, S.D.² Burton, B.B.³ Carcia, P.F.⁴ McLean, R.S.⁵ George, S.M.⁶

5
- 66749120161
- 10.1002/adma.200803440
- J. Meyer, P. Gorrn, F. Bertram, S. Hamwi, T. Winkler, H. H. Johannes, T. Weimann, P. Hinze, T. Riedl, and W. Kowalsky, Adv. Mater. 21 (18), 1845 (2009). 10.1002/adma.200803440
- (2009) Adv. Mater. , vol.21 , Issue.18 , pp. 1845
- Meyer, J.¹ Gorrn, P.² Bertram, F.³ Hamwi, S.⁴ Winkler, T.⁵ Johannes, H.H.⁶ Weimann, T.⁷ Hinze, P.⁸ Riedl, T.⁹ Kowalsky, W.¹⁰

6
- 77953730270
- 10.1063/1.3455324
- J. Meyer, H. Schmidt, W. Kowalsky, T. Riedl, and A. Kahn, Appl. Phys. Lett. 96 (24), 243308 (2010). 10.1063/1.3455324
- (2010) Appl. Phys. Lett. , vol.96 , Issue.24 , pp. 243308
- Meyer, J.¹ Schmidt, H.² Kowalsky, W.³ Riedl, T.⁴ Kahn, A.⁵

7
- 65449175668
- 10.1063/1.3115144
- N. Kim, W. J. Potscavage, B. Domercq, B. Kippelen, and S. Graham, Appl. Phys. Lett. 94 (16), 163308 (2009). 10.1063/1.3115144
- (2009) Appl. Phys. Lett. , vol.94 , Issue.16 , pp. 163308
- Kim, N.¹ Potscavage, W.J.² Domercq, B.³ Kippelen, B.⁴ Graham, S.⁵

8
- 84858715196
- 10.1016/j.solmat.2012.02.002
- N. Kim, W. J. Potscavage, A. Sundaramoothi, C. Henderson, B. Kippelen, and S. Graham, Sol. Energy Mater. Sol. Cells 101, 140-146 (2012). 10.1016/j.solmat.2012.02.002
- (2012) Sol. Energy Mater. Sol. Cells , vol.101 , pp. 140-146
- Kim, N.¹ Potscavage, W.J.² Sundaramoothi, A.³ Henderson, C.⁴ Kippelen, B.⁵ Graham, S.⁶

9
- 84858649328
- 10.1143/APEX.5.035701
- S.-W. Seo, E. Jung, C. Lim, H. Chae, and S. M. Cho, Appl. Phys. Express 5 (3), 035701 (2012). 10.1143/APEX.5.035701
- (2012) Appl. Phys. Express , vol.5 , Issue.3 , pp. 035701
- Seo, S.-W.¹ Jung, E.² Lim, C.³ Chae, H.⁴ Cho, S.M.⁵

10
- 84862729679
- 10.1088/0268-1242/27/7/074002
- J. A. Van Delft, D. Garcia-Alonso, and W. M. M. Kessels, Semicond. Sci. Technol. 27 (7), 074002 (2012). 10.1088/0268-1242/27/7/074002
- (2012) Semicond. Sci. Technol. , vol.27 , Issue.7 , pp. 074002
- Van Delft, J.A.¹ Garcia-Alonso, D.² Kessels, W.M.M.³

11
- 33645142579
- 10.1016/S1369-7021(06)71446-8
- J. Lewis, Mater. Today 9 (4), 38-45 (2006). 10.1016/S1369-7021(06)71446-8
- (2006) Mater. Today , vol.9 , Issue.4 , pp. 38-45
- Lewis, J.¹

12
- 79955706564
- (IDTechEx).
- R. Das and P. Harrop, Printed, Organic Flexible Electronics Forecasts, Players Opportunities 2010-2020 (IDTechEx, 2010).
- (2010) Printed, Organic Flexible Electronics Forecasts, Players Opportunities 2010-2020
- Das, R.¹ Harrop, P.²

13
- 47749083999
- 10.1109/JMEMS.2008.916328
- J. H. Seo and O. Brand, J. Microelectromech. Syst. 17 (2), 483-493 (2008). 10.1109/JMEMS.2008.916328
- (2008) J. Microelectromech. Syst. , vol.17 , Issue.2 , pp. 483-493
- Seo, J.H.¹ Brand, O.²

14
- 51849097169
- 10.1002/jbm.a.31732
- D. S. Finch, T. Oreskovic, K. Ramadurai, C. F. Herrmann, S. M. George, and R. L. Mahajan, J. Biomed. Mater. Res. Part A 87 (1), 100-106 (2008). 10.1002/jbm.a.31732
- (2008) J. Biomed. Mater. Res. Part A , vol.87 , Issue.1 , pp. 100-106
- Finch, D.S.¹ Oreskovic, T.² Ramadurai, K.³ Herrmann, C.F.⁴ George, S.M.⁵ Mahajan, R.L.⁶

15
- 84865850543
- 10.1063/1.4748322
- X. Z. Xie, L. Rieth, S. Merugu, P. Tathireddy, and F. Solzbacher, Appl. Phys. Lett. 101 (9), 093702 (2012). 10.1063/1.4748322
- (2012) Appl. Phys. Lett. , vol.101 , Issue.9 , pp. 093702
- Xie, X.Z.¹ Rieth, L.² Merugu, S.³ Tathireddy, P.⁴ Solzbacher, F.⁵

16
- 1242320224
- 10.1021/cm0304546
- M. D. Groner, F. H. Fabreguette, J. W. Elam, and S. M. George, Chem. Mater. 16 (4), 639-645 (2004). 10.1021/cm0304546
- (2004) Chem. Mater. , vol.16 , Issue.4 , pp. 639-645
- Groner, M.D.¹ Fabreguette, F.H.² Elam, J.W.³ George, S.M.⁴

17
- 79955725987
- 10.1063/1.3567912
- S. H. Jen, J. A. Bertrand, and S. M. George, J. Appl. Phys. 109 (8), 084305 (2011). 10.1063/1.3567912
- (2011) J. Appl. Phys. , vol.109 , Issue.8 , pp. 084305
- Jen, S.H.¹ Bertrand, J.A.² George, S.M.³

18
- 78249245724
- 10.1016/j.sna.2010.09.018
- D. C. Miller, R. R. Foster, S. H. Jen, J. A. Bertrand, S. J. Cunningham, A. S. Morris, Y. C. Lee, S. M. George, and M. L. Dunn, Sens. Actuator, A 164 (1-2), 58-67 (2010). 10.1016/j.sna.2010.09.018
- (2010) Sens. Actuator, A , vol.164 , Issue.12 , pp. 58-67
- Miller, D.C.¹ Foster, R.R.² Jen, S.H.³ Bertrand, J.A.⁴ Cunningham, S.J.⁵ Morris, A.S.⁶ Lee, Y.C.⁷ George, S.M.⁸ Dunn, M.L.⁹

19
- 67249156649
- 10.1063/1.3124642
- D. C. Miller, R. R. Foster, Y. D. Zhang, S. H. Jen, J. A. Bertrand, Z. X. Lu, D. Seghete, J. L. O'Patchen, R. G. Yang, Y. C. Lee, S. M. George, and M. L. Dunn, J. Appl. Phys. 105 (9), 093527 (2009). 10.1063/1.3124642
- (2009) J. Appl. Phys. , vol.105 , Issue.9 , pp. 093527
- Miller, D.C.¹ Foster, R.R.² Zhang, Y.D.³ Jen, S.H.⁴ Bertrand, J.A.⁵ Lu, Z.X.⁶ Seghete, D.⁷ O'Patchen, J.L.⁸ Yang, R.G.⁹ Lee, Y.C.¹⁰ George, S.M.¹¹ Dunn, M.L.¹²

20
- 33745809830
- Special Issue 10.1016/j.sna.2006.01.029
- M. K. Tripp, C. Stampfer, D. C. Miller, T. Helbling, C. F. Herrmann, C. Hierold, K. Gall, S. M. George, and V. M. Bright, Sens. Actuators, A 130-131 (Special Issue), 419-429 (2006). 10.1016/j.sna.2006.01.029
- (2006) Sens. Actuators, A , vol.130-131 , pp. 419-429
- Tripp, M.K.¹ Stampfer, C.² Miller, D.C.³ Helbling, T.⁴ Herrmann, C.F.⁵ Hierold, C.⁶ Gall, K.⁷ George, S.M.⁸ Bright, V.M.⁹

21
- 80054034719
- 10.1016/j.tsf.2011.07.056
- Y. D. Zhang, R. G. Yang, S. M. George, and Y. C. Lee, Thin Solid Films 520 (1), 251-257 (2011). 10.1016/j.tsf.2011.07.056
- (2011) Thin Solid Films , vol.520 , Issue.1 , pp. 251-257
- Zhang, Y.D.¹ Yang, R.G.² George, S.M.³ Lee, Y.C.⁴

22
- 0142159473
- (Cambridge University Press, Cambridge, England).
- L. B. Freund and S. Suresh, Thin Film Materials: Stress, Defect Formation, and Surface Evolution (Cambridge University Press, Cambridge, England, 2003).
- (2003) Thin Film Materials: Stress, Defect Formation, and Surface Evolution
- Freund, L.B.¹ Suresh, S.²

23
- 80051789411
- 10.1016/j.scriptamat.2011.06.034
- E. K. Baumert, P. O. Theillet, and O. N. Pierron, Scr. Mater. 65 (7), 596-599 (2011). 10.1016/j.scriptamat.2011.06.034
- (2011) Scr. Mater. , vol.65 , Issue.7 , pp. 596-599
- Baumert, E.K.¹ Theillet, P.O.² Pierron, O.N.³

24
- 64349114281
- 10.1063/1.3112565
- M. Budnitzki and O. N. Pierron, Appl. Phys. Lett. 94 (14), 141906 (2009). 10.1063/1.3112565
- (2009) Appl. Phys. Lett. , vol.94 , Issue.14 , pp. 141906
- Budnitzki, M.¹ Pierron, O.N.²

25
- 77949542524
- 10.1016/j.actamat.2010.01.011
- E. K. Baumert, P. O. Theillet, and O. N. Pierron, Acta Mater. 58 (8), 2854-2863 (2010). 10.1016/j.actamat.2010.01.011
- (2010) Acta Mater. , vol.58 , Issue.8 , pp. 2854-2863
- Baumert, E.K.¹ Theillet, P.O.² Pierron, O.N.³

26
- 64349110987
- 10.1016/j.actamat.2009.03.004
- M. Budnitzki and O. N. Pierron, Acta Mater. 57 (10), 2944-2955 (2009). 10.1016/j.actamat.2009.03.004
- (2009) Acta Mater. , vol.57 , Issue.10 , pp. 2944-2955
- Budnitzki, M.¹ Pierron, O.N.²

27
- 79957937922
- 10.1063/1.1455142
- C. L. Muhlstein, E. A. Stach, and R. O. Ritchie, Appl. Phys. Lett. 80 (9), 1532 (2002). 10.1063/1.1455142
- (2002) Appl. Phys. Lett. , vol.80 , Issue.9 , pp. 1532
- Muhlstein, C.L.¹ Stach, E.A.² Ritchie, R.O.³

28
- 84875812802
- Comparison of the stress distribution and fatigue behavior of 10- and 25-μm-thick deep-reactive-ion-etched Si kilohertz resonators
- (published online). 10.1109/JMEMS.2012.2226933
- T. Straub, P. O. Theillet, C. Eberl, and O. N. Pierron, " Comparison of the stress distribution and fatigue behavior of 10- and 25-μm-thick deep-reactive-ion-etched Si kilohertz resonators.," J. Microelectromech. Syst. (published online). 10.1109/JMEMS.2012.2226933
- J. Microelectromech. Syst.
- Straub, T.¹ Theillet, P.O.² Eberl, C.³ Pierron, O.N.⁴

29
- 65549128182
- 10.1063/1.3133357
- P. O. Theillet and O. N. Pierron, Appl. Phys. Lett. 94 (18), 181915 (2009). 10.1063/1.3133357
- (2009) Appl. Phys. Lett. , vol.94 , Issue.18 , pp. 181915
- Theillet, P.O.¹ Pierron, O.N.²

30
- 84871803475
- 10.1016/j.sna.2012.09.020
- E. Hosseinian, P. O. Theillet, and O. N. Pierron, Sens. Actuators, A 189 (0), 380-389 (2013). 10.1016/j.sna.2012.09.020
- (2013) Sens. Actuators, A , vol.189 , Issue.0 , pp. 380-389
- Hosseinian, E.¹ Theillet, P.O.² Pierron, O.N.³

31
- 0015967364
- A. G. Evans and E. R. Fuller, Metall. Trans. 5, 27 (1974).
- (1974) Metall. Trans. , vol.5 , pp. 27
- Evans, A.G.¹ Fuller, E.R.²

32
- 0033501736
- 10.1023/A:1018655917051
- R. O. Ritchie, Int. J. Fract. 100, 55-83 (1999). 10.1023/A:1018655917051
- (1999) Int. J. Fract. , vol.100 , pp. 55-83
- Ritchie, R.O.¹

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