Fast patterning of poly(methyl methacrylate) by a novel soft molding approach and its application to the fabrication of silver structures

Materials Chemistry and Physics

Volumn 137, Issue 3, 2013, Pages 884-891

  Mondin, Giovanni ^a   Schumm, Benjamin ^a   Fritsch, Julia ^a   Hensel, René ^b   Grothe, Julia ^a   Kaskel, Stefan ^a  

^a DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

^b LEIBNIZ INSTITUTE OF POLYMER RESEARCH DRESDEN   (Germany)

Author keywords

Evaporation; Lithography; Microstructure; Polymers

Indexed keywords

DEFECT-FREE; ELASTOMERIC MOLDS; HIGH VOLATILITY; METAL ETCHING; PATTERNING PROCESS; SILVER DEPOSITION; SINGLE-STEP; SOFT MOLDING; SUBMICROMETERS; TRANSPARENT ELECTRODE;

ACETONE; ELECTROLESS PLATING; ESTERS; EVAPORATION; LITHOGRAPHY; MICROELECTRONICS; MICROSTRUCTURE; MOLDING; PHASE TRANSITIONS; POLYMERS; SILVER;

FABRICATION;

EID: 84871338790     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matchemphys.2012.10.030     Document Type: Article

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