Using a floating-gate MOS transistor as a transducer in a MEMS gas sensing system

Sensors (Switzerland)

Volumn 10, Issue 11, 2010, Pages 10413-10434

  Barranca, Mario Alfredo Reyes ^a   Mendoza Acevedo, Salvador ^a   Flores Nava, Luis M ^a   Avila García, Alejandro ^a   Vazquez Acosta, E N ^a   Moreno Cadenas, José Antonio ^a   Casados Cruz, Gaspar ^a  

^a DEPARTAMENTO DE FÍSICA   (Mexico)

Author keywords

Floating gate MOSFET; Gas sensor; MEMS

Indexed keywords

DIGITAL APPLICATIONS; ELECTROCHEMICAL POTENTIAL; FLOATING GATE MOS TRANSISTORS; FLOATING GATE MOSFET; GAS-SENSING SYSTEMS; SENSITIVE DEVICES; SIGNAL PROCESSING ELECTRONICS; STANDARD TECHNOLOGY;

CHEMICAL REACTIONS; CHEMICAL SENSORS; CMOS INTEGRATED CIRCUITS; GAS DETECTORS; MEMS; METALS; RELIABILITY ANALYSIS; SIGNAL PROCESSING; TRANSISTORS;

FIELD EFFECT TRANSISTORS;

ARTICLE; GAS; INSTRUMENTATION; METHODOLOGY; MICROELECTROMECHANICAL SYSTEM; SEMICONDUCTOR; TRANSDUCER;

GASES; MICRO-ELECTRICAL-MECHANICAL SYSTEMS; TRANSDUCERS; TRANSISTORS, ELECTRONIC;

EID: 84871102394     PISSN: 14248220     EISSN: None     Source Type: Journal    
DOI: 10.3390/s101110413     Document Type: Article

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