Investigation of stability and reliability of tin oxide thin-film for integrated micro-machined gas sensor devices

Sensors and Actuators, B: Chemical

Volumn 81, Issue 1, 2001, Pages 9-16

  Sharma, Rajnish K ^a   Chan, Philip C H ^a   Tang, Zhenan ^a   Yan, Guizhen ^a   Hsing, I Ming ^a   Sin, Johnny K O ^a  

^a HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

Author keywords

CMOS compatible; Integrated sensor; Lifetime; Reliability; Stability

Indexed keywords

ANNEALING; CHEMICAL SENSORS; CMOS INTEGRATED CIRCUITS; CRACKS; DIGITAL SIGNAL PROCESSING; MICROMACHINING; SCANNING ELECTRON MICROSCOPY; SURFACE STRUCTURE; THERMAL EFFECTS; TIN COMPOUNDS;

INTEGRATED SENSORS;

THIN FILM DEVICES;

EID: 0035892727     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(01)00920-0     Document Type: Article

References (9)

1. An integrated gas sensor using surface micro-machining
2. 2/Pt thin-film with silicon integrated circuit processing
3. Sensitive, selective and stable tin dioxide thin-films for carbon monoxide and hydrogen sensing in integrated gas array applications
4. An integrated gas sensor based on tin oxide thin-film and improved micro-hotplate
5. Investigation and control of microcracks in tin oxide gas sensor thin-film
6. 2