On the fabrication parameters of buried microchannels integrated in in-plane silicon microprobes

Materials Science Forum

Volumn 729, Issue , 2013, Pages 210-215

  Fekete, Z ^a   Pongracz A ^a   Marton G ^a   Furjes P ^a  

^a INSTITUTE OF EXPERIMENTAL MEDICINE   (Hungary)

Author keywords

Buried microchannel; Deep reactive ion etching; Hollow microprobes; Microfluidics

Indexed keywords

DRY ETCHING; MICROCHANNELS; REACTIVE ION ETCHING; SILICON;

DEEP REACTIVE ION ETCHING; ETCHING PARAMETERS; FABRICATION PARAMETERS; FUNCTIONAL ASPECTS; INTEGRABILITY; MICRO-PROBES;

MICROFLUIDICS;

EID: 84870746502     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/MSF.729.210     Document Type: Conference Paper

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