A versatile surface channel concept for microfluidic applications

Journal of Micromechanics and Microengineering

Volumn 17, Issue 10, 2007, Pages 1971-1977

  Dijkstra, M ^a   De Boer, M J ^a   Berenschot, J W ^a   Lammerink, T S J ^a   Wiegerink, R J ^a   Elwenspoek, M ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; LITHOGRAPHY; MEMS; MICROFLUIDICS; SUSPENSIONS (COMPONENTS); VACUUM APPLICATIONS;

ANODIC BONDING; PATTERN TRANSFER; SURFACE CHANNELS; SUSPENDED MICROCHANNELS;

SURFACE STRUCTURE;

EID: 34748902476     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/10/007     Document Type: Article

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