Electrodeposition and characterization of CoNiMnP permanent magnet arrays for MEMS sensors and actuators

Sensors and Actuators, A: Physical

Volumn 188, Issue , 2012, Pages 190-197

  Sun, Xuming ^a   Yuan, Quan ^a   Fang, Dongming ^b   Zhang, Haixia ^a  

^a PEKING UNIVERSITY   (China)

^b INSTITUTE OF ELECTRONICS   (China)

Author keywords

CoNiMnP; Electrodeposition; Magnetic MEMS; Micro fabrication; Permanent magnet arrays

Indexed keywords

CONIMNP; CYLINDER ARRAYS; CYLINDER MAGNETS; ENERGY DENSITY; HIGH COERCIVITY; MAGNETIC MEMS; MAGNETIC PERFORMANCE; MEMS SENSORS; PERMANENT MAGNET ARRAY; SQUARE SHAPE; TOTAL ENERGY;

ASPECT RATIO; CYLINDERS (SHAPES); ELECTRODEPOSITION; ELECTROMAGNETIC WAVES; MAGNETS;

FABRICATION;

EID: 84870058457     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2011.12.025     Document Type: Conference Paper

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