Electrodeposition of hard magnetic CoPtP material and integration into magnetic MEMS

Journal of Micromechanics and Microengineering

Volumn 16, Issue 2, 2006, Pages 219-224

  Vieux Rochaz, L ^a   Dieppedale, C ^a   Desloges, B ^a   Gamet, D ^a   Barragatti, C ^a   Rostaing, H ^b   Meunier Carus, J ^b  

^a CEA LETI   (France)

^b ENSIEG   (France)

Author keywords

[No Author keywords available]

Indexed keywords

COERCIVE FORCE; ELECTRIC COMMUTATION; ELECTRODEPOSITION; MAGNETIC MATERIALS; MAGNETIZATION; MICROELECTROMECHANICAL DEVICES; PHOTORESISTS; X RAY DIFFRACTION;

ACIDIC BATH; MECHANICAL GUIDING; MICROMAGNETS;

COBALT COMPOUNDS;

EID: 31444443336     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/2/005     Document Type: Article

References (11)

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