Electroplated hard magnetic material and its application in microelectromechanical systems

IEEE Transactions on Magnetics

Volumn 41, Issue 12, 2005, Pages 4380-4383

  Su, Yufeng ^a   Wang, Hong ^a   Ding, Guifu ^a   Cui, Feng ^a   Zhang, Weiping ^a   Chen, Wenyuan ^a  

^a Shanghai Jiao Tong University   (China)

Author keywords

Bidirectional actuator; Electroplated; Micro electromechanical systems (MEMS); Permanent magnet

Indexed keywords

ACTUATORS; ELECTROPLATING; MAGNETIC FIELDS; MAGNETIC MATERIALS; MICROELECTROMECHANICAL DEVICES; PERMANENT MAGNETS; SYNTHESIS (CHEMICAL);

BIDIRECTIONAL ACTUATOR; ELECTROPLATED; EXTERNAL MAGNETIC FIELDS; MICROELECTROMECHANICAL SYSTEMS (MEMS);

COBALT COMPOUNDS;

EID: 29744468216     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMAG.2005.855644     Document Type: Article

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