Permanent magnets for MEMS

Journal of Microelectromechanical Systems

Volumn 18, Issue 6, 2009, Pages 1255-1266

  Arnold, David P ^a   Wang, Naigang ^a  

^a UNIVERSITY OF FLORIDA   (United States)

Author keywords

Magnetic alloys; Magnetic devices; Magnetic microactuator and system (MAGMAS); Magnets; Microelectromechanical systems (MEMS); Microfabrication

Indexed keywords

MAGNETIC ALLOY; MAGNETIC ALLOYS; MAGNETIC MICRO ACTUATORS; MAGNETIC MICROACTUATOR AND SYSTEM (MAGMAS); MICROELECTROMECHANICAL SYSTEMS; MICROELECTROMECHANICAL SYSTEMS (MEMS);

COMPOSITE MICROMECHANICS; MAGNETIC DEVICES; MAGNETIC MATERIALS; MAGNETISM; MECHATRONICS; MEMS; MICROACTUATORS; MICROANALYSIS; MICROFABRICATION; MICROMACHINING; PERMANENT MAGNETS;

MICROELECTROMECHANICAL DEVICES;

EID: 71549128016     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2009.2034389     Document Type: Article

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