Electroplated thick CoNiMnP permanent magnet arrays for micromachined magnetic device applications

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1996, Pages 79-84

  Liakopoulos, Trifon M ^a   Zhang, Wenjin ^a   Ahn, Chong H ^a  

^a UNIVERSITY OF CINCINNATI   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ARRAYS; CMOS INTEGRATED CIRCUITS; COERCIVE FORCE; COPPER ALLOYS; ELECTROPLATED PRODUCTS; MAGNETIC DEVICES; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SILICON WAFERS;

ENERGY DENSITY; MICROACTUATOR; PERMANENT MAGNET ARRAYS; SILICON MEMBRANE;

PERMANENT MAGNETS;

EID: 0029771208     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)