Ultra-compact micromirror with polymeric hard magnet for use in endoscopic imaging

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2011, Pages 732-735

  Weber, N ^a   Hertkorn, D ^a   Zappe, H ^a   Seifert, A ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DEFLECTION ANGLES; ELECTRICAL CONNECTION; ENDOSCOPIC IMAGING; HARD MAGNETS; LOW MAGNETIC FIELDS; MAGNETIC LAYERS; MICRO MIRROR; NOVEL CONSTRUCTION; ROTATING PLATFORM;

BLOOD VESSELS; ELECTRIC CONNECTORS; ENDOSCOPY; MAGNETIC FIELD EFFECTS; MECHANICAL ENGINEERING; MECHANICS; MEMS; REACTIVE ION ETCHING;

POLYMERS;

EID: 79953778078     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2011.5734529     Document Type: Conference Paper

References (4)

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3. Z. Cui, X. Wang, Y. Li, and G. Y. Tian, "Fabrication of micromirror-based magnetic sensors," Journal of Physics: Conference Series, vol. 76, pp. 1-5, 2007.
4. Y. Okano and Y. Hirabayashi, "Magnetically actuated micromirror and measurement system for motion characteristics using specular reflection," IEEE Journal on selected topics in quantum electronics, vol. 8, pp. 19-25, 2002. (Pubitemid 34491549)