A two-step wet etch process for the facile fabrication of hybrid micro-nanofluidic devices

ASME 2011 International Mechanical Engineering Congress and Exposition, IMECE 2011

Volumn 11, Issue , 2011, Pages 647-651

  Pinti, Marie ^a   Prakash, Shaurya ^a  

^a Ohio State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; DESALINATION; FABRICATION; MICROFLUIDICS; WATER FILTRATION;

FACILE FABRICATION; LAB ON CHIP; MOLECULAR GATES; NANO CHANNELS; NANO-FLUIDIC DEVICES; WATER DESALINATION; WET ETCH PROCESS;

NANOFLUIDICS;

EID: 84869167066     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/imece2011-64508     Document Type: Conference Paper

References (25)

1. Prakash, S., M.B. Karacor, and S. Banerjee, Surface modification in microsystems and nanosystems. Surface Science Reports 2009. 64: p. 233-254.
2. Nishizawa, M., V.P. Menon, and C.R. Martin, Metal nanotubule membranes with electrochemically switchable ion-transport selectivity. Science, 1995. 268: p. 700-702.
3. Kim, S.J., Y.-C. Wang, J.H. Lee, H. Jang, and J. Han, Concentration Polarization and Nonlinear Electrokinetic Flow near a Nanofluidic Channel. Physical Review Letters, 2007. 99: p. 044501.
4. Holt, J.K., H.G. Park, Y. Wang, M. Stadermann, A.B. Artyukhin, C.P. Grigoropoulos, A. Noy, and O. Bakajin, Fast Mass Transport Through Sub-2-Nanometer Carbon Nanotubes. Science, 2006. 312: p. 1034-1037.
5. Xuan, X., Ion separation in nanofluidics. Electrophoresis, 2008. 29: p. 3737-3743.
6. Verbridge, S.S., J.B. Edel, S.M. Stavis, J.M. Moran-Mirabal, S.D. Allen, G. Coates, and H.G. Craighead, Suspended glass nanochannels coupled with microstructures for single molecule detection Journal of Applied Physics. 97(12): p. 124317-124317-4.
7. Guo, L.J., X. Cheng, and C.F. Chou, Fabrication of Size-Controllable Nanofluidic Channels by Nanoimprinting and Its Application for DNA Stretching. Nano Letters, 2004. 4(1): p. 69-73.
8. Matsumoto, K., T. Kawakami, M. Nakao, Y. Hatamura, T. Kitamori, and T. Sawada. Nanochannel on Quartz Chip Laboratory Using Single Molecular Detectable Thermal Lens Microscope. in IEEE MEMS. 1998.
9. Mao, P. and J. Han, Fabrication and characterization of 20 nm planar nanofluidic channels by glass-glass and glass-silicon bonding. Lab On a Chip, 2005. 5: p. 837-844.
10. O'BrienII, M.J., P. Bisong, L.K. Ista, E.M. Rabinovich, A.L. Garcia, S.S. Sibbett, G.P. Lopez, and S.R.J. Brueck, Fabrication of an integrated nanofluidic chip ising interfeormetric lithography. J Vac Sci Technol, 2003. 21(6): p. 2941-2945.
11. Parka, S.-m., Y.S. Huhb, H.G. Craigheada, and D. Erickson, A method for nanofluidic device prototyping using elastomeric collapse. PNAS, 2009. 106 (37): p. 15549-15554.
12. Cao, H., Z. Yu, J. Wang, J.O. Tegenfeldt, R.H. Austin, E. Chen, W. Wu, and S.Y. Chou, Fabrication of 10 nm enclosed nanofluidic channels. Applied Physics Letters, 2002. 81(1): p. 174-176.
13. Delft, K.M.v., J.C.T. Eijkel, D. Mijatovic, T.S. Druzhinina, H. Rathgen, N.R. Tas, A.v.d. Berg, and F. Mugele, Micromachined Fabry-Perot Interferometer with Embedded Nanochannels for Nanoscale Fluid Dynamics. Nano Letters, 2007. 7(2): p. 345-350.
14. Abgrall, P. and N.T. Nguyen, Nanofluidic Devices and Their Applicactions. Analytical Chemistry 2008. 80(7): p. 2326-2341.
15. Madou, M., Fundamentals of Microfabrication. 1997, Boca Raton: CRC Press LLC.
16. Lao, K.P., N.K. Yao, and T.S. Kuo. Sub-60nm Nanofluidic Channels Fabricated by Glass-Glass Bonding. in 28th IEEE EMBS Annual International Conference. 2006. New York City, USA.
17. Persson, F., L.H. Thamdrup, M.B.L. Mikkelsen, S.E. Jaarlgard, P. Skafte-Pedersen, H. Bruus, and A. Kristensen, Double thermal oxidation scheme for the fabrication of SiO2 nanochannels. Nanotechnology, 2007. 18: p. 245301 (4pp).
18. Yeom, J. and M.A. Shannon, Detachment Lithography of Photosensitive Polymers: A Route to Fabricating Three-Dimensional Structures. Adv. Funct. Mater., 2009. 19: p. 1-7.
19. Zhu, H., M. Holl, T. Ray, S. Bhushan, and D.R. Meldrum, Characterization of deep wet etching of fused silica glass for single cell and optical sensor deposition. Journal of Micromechanics and Microengineering, 2009. 19: p. 065013 (8pp).
20. Qin, D., Y. Xia, and G.M. Whitesides, Soft lithography for micro- and nanoscale patterning. Nature Protocols, 2010. 5(3): p. 491-502.
21. Eijkel, J.C.T., J. Bomer, N.R. Tas, and A.v.d. Berg, 1-D Nanochannels fabricated in polyimide. Lab Chip, 2004. 4: p. 161-163.
22. Tas, N.R., J.W. Berenschot, P. Mela, H.V. Jansen, M. Elwenspoek, and A.v.d. Berg, 2D-Confined Nanochannels Fabricated by Conventional Micromachining Nano Letters, 2002. 2(9): p. 1031-1032.
23. Lee, J., Y.K. Yeon, J. Kim, Y. Kim, and K. Jo, Roof-Collapsed PDMS Mask for Nanochannel Fabrication. Bull Korean Chem Soc, 2011. 32(1): p. 33.
24. Tang, K.C., E. Liao, W.L. Ong, J.D.S. Wong, A. Agarwal, R. Nagarajan, and L. Yobas, Evaluation of bonding between oxygen plasma treated polydimethyl siloxane and passivated silicon. Journal of Physics: Conference Series, 2006. 34: p. 155-161.
25. Marrian, C.R.K. and D.M. Tennant, Nanofabrication. Journal of Vaccuum Science and Technology, 2003. 21(5): p. 207-215.