Fabrication and characterization of 20 nm planar nanofluidic channels by glass-glass and glass-silicon bonding

Lab on a Chip

Volumn 5, Issue 8, 2005, Pages 837-844

  Mao, Pan ^a   Han, Jongyoon ^a,b  

^a Department of Mechanical Engineering ^*  (United States)

^b MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

GLASS; NANOPARTICLE; SILICON;

ARTICLE; CHEMICAL BINDING; MICROFLUIDICS; PRIORITY JOURNAL; SCANNING ELECTRON MICROSCOPY; SURFACE PROPERTY;

EID: 23644452355     PISSN: 14730197     EISSN: 14730189     Source Type: Journal    
DOI: 10.1039/b502809d     Document Type: Article

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