Sub-60 nm nanofluidic channels fabricated by glass-glass bonding

Annual International Conference of the IEEE Engineering in Medicine and Biology - Proceedings

Volumn , Issue , 2006, Pages 2832-2835

  Liao, Ke Pan ^a,b   Yao, Nan Kuang ^b   Kuo, Te Son ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

Glass glass fusion bonding; Nanochannels; Sub 60 nm deep nanofluidic channels

Indexed keywords

BOROSILICATE GLASS; FLUORESCENCE; GLASS BONDING; MICROFABRICATION; NANOLITHOGRAPHY; SUBSTRATES;

BOROSILICATE GLASS SUBSTRATES; FUSION BONDING; GLASS GLASS FUSION BONDING; NANOCHANNELS; NANOFLUIDIC CHANNELS;

NANOFLUIDICS;

GLASS; NANOMATERIAL;

ARTICLE; CHEMISTRY; ELECTRONICS; EQUIPMENT; EQUIPMENT DESIGN; EQUIPMENT FAILURE; EVALUATION STUDY; METHODOLOGY; MICROFLUIDIC ANALYSIS; NANOTECHNOLOGY; ULTRASTRUCTURE;

EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; GLASS; MICROFLUIDIC ANALYTICAL TECHNIQUES; MINIATURIZATION; NANOSTRUCTURES; NANOTECHNOLOGY;

EID: 34047166028     PISSN: 05891019     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IEMBS.2006.260781     Document Type: Conference Paper

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