Rapid manufacturing of low-noise membranes for nanopore sensors by trans-chip illumination lithography

Nanotechnology

Volumn 23, Issue 47, 2012, Pages

  Janssen, Xander J A ^a   Jonsson, Magnus P ^a   Plesa, Calin ^a   Soni, Gautam V ^a   Dekker, Cees ^a   Dekker, Nynke H ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

BIO-MOLECULAR; COMPLEX DESIGNS; ELECTRICAL NOISE; INSULATING LAYERS; LOW NOISE; LOWER NOISE; MICROFABRICATION METHODS; PROOF OF PRINCIPLES; RAPID MANUFACTURING; SILICON CHIP; SILICON NITRIDE MEMBRANE; SINGLE LAYER; THIN MEMBRANE;

FABRICATION; INSULATING MATERIALS; LITHOGRAPHY; NANOPORES; PHOTORESISTS; SILICON NITRIDE; SILICON WAFERS;

MEMBRANES;

SILICON DERIVATIVE; SILICON NITRIDE;

ARTICLE; CHEMISTRY; ILLUMINATION; LIGHT; METHODOLOGY; NANOPORE; NANOTECHNOLOGY; ULTRASTRUCTURE;

LIGHT; LIGHTING; NANOPORES; NANOTECHNOLOGY; SILICON COMPOUNDS;

EID: 84868120952     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/23/47/475302     Document Type: Article

References (34)

1. Banerjee J, Verma M K, Manna S and Ghosh S 2006 Self-organised criticality and 1/f noise in single-channel current of voltage-dependent anion channel Europhys. Lett. 73 457-63 (Pubitemid 43188513)
2. Bezrukov S M and Winterhalter M 2000 Examining noise sources at the single-molecule level: 1/f noise of an open maltoporin channel Phys. Rev. Lett. 85 202-5
3. Chen P, Mitsui T, Farmer D B, Golovchenko J, Gordon R G and Branton D 2004 Atomic layer deposition to fine-tune the surface properties and diameters of fabricated nanopores Nano Lett. 4 1333-7 (Pubitemid 39092181)
4. Collins P G, Fuhrer M S and Zettl A 2000 1/f noise in carbon nanotubes Appl. Phys. Lett. 76 894-6
5. Danelon C, Perez J B, Santschi C, Brugger J and Vogel H 2006 Cell membranes suspended across nanoaperture arrays Langmuir 22 22-5 (Pubitemid 43063517)
6. Deshpande S V, Gulari E, Brown S W and Rand S C 1995 Optical-properties of silicon-nitride films deposited by hot-filament chemical-vapor-deposition J. Appl. Phys. 77 6534-41
7. Jung Y, Vacic A, Sun Y, Hadjimichael E and Reed M A 2012 Mapping of near field light and fabrication of complex nanopatterns by diffraction lithography Nanotechnology 23 045301
8. Kasianowicz J J, Brandin E, Branton D and Deamer D W 1996 Characterization of individual polynucleotide molecules using a membrane channel Proc. Natl Acad. Sci. USA 93 13770-3 (Pubitemid 26424195)
9. Keyser U F, Krapf D, Koeleman B N, Smeets R M M, Dekker N H and Dekker C 2005 Nanopore tomography of a laser focus Nano Lett. 5 2253-6 (Pubitemid 41698948)
10. Kowalczyk S W, Hall A R and Dekker C 2010 Detection of local protein structures along DNA using solid-state nanopores Nano Lett. 10 324-8
11. Krapf D, Wu M Y, Smeets R M M, Zandbergen H W, Dekker C and Lemay S G 2006 Fabrication and characterization of nanopore-based electrodes with radii down to 2 nm Nano Lett. 6 105-9 (Pubitemid 43166110)
12. Levis R A and Rae J L 1993 The use of quartz patch pipettes for low-noise single-channel recording Biophys. J. 65 1666-77 (Pubitemid 23316986)
13. Li J, Gershow M, Stein D, Brandin E and Golovchenko J A 2003 DNA molecules and configurations in a solid-state nanopore microscope Nature Mater. 2 611-5
14. Li J, Stein D, McMullan C, Branton D, Aziz M J and Golovchenko J A 2001 Ion-beam sculpting at nanometre length scales Nature 412 166-9 (Pubitemid 32674708)
15. Marshall M M, Yang J and Hall A R 2012 Direct and transmission milling of suspended silicon nitride membranes with a focused helium ion beam Scanning 34 101-6
16. Nilsson J, Lee J R I, Ratto T V and Letant S E 2006 Localized functionalization of single nanopores Adv. Mater. 18 427-31
17. Siwy Z and Fulinski A 2002 Origin of 1/f (alpha) noise in membrane channel currents Phys. Rev. Lett. 89 158101
18. Smeets R M, Keyser U F, Krapf D, Wu M Y, Dekker N H and Dekker C 2006 Salt dependence of ion transport and DNA translocation through solid-state nanopores Nano Lett. 6 89-95 (Pubitemid 43166107)
19. Smeets R M M, Dekker N H and Dekker C 2009 Low-frequency noise in solid-state nanopores Nanotechnology 20 095501
20. Smeets R M M, Keyser U F, Dekker N H and Dekker C 2008 Noise in solid-state nanopores Proc. Natl Acad. Sci. USA 105 417-21 (Pubitemid 351171722)
21. Smeets R M M, Keyser U F, Krapf D, Wu M Y, Dekker N H and Dekker C 2006 Salt dependence of ion transport and DNA translocation through solid-state nanopores Nano Lett. 6 89-95 (Pubitemid 43166107)
22. Steinbock L J, Otto O, Chimerel C, Gornall J and Keyser U F 2010 Detecting DNA folding with nanocapillaries Nano Lett. 10 2493-7
23. Storm A J, Chen J H, Ling X S, Zandbergen H W and Dekker C 2003 Fabrication of solid-state nanopores with single-nanometre precision Nature Mater. 2 537-40
24. Storm A J, Chen J H, Zandbergen H W and Dekker C 2005 Translocation of double-strand DNA through a silicon oxide nanopore Phys. Rev. E 71 051903 (Pubitemid 41480966)
25. Tabard-Cossa V, Trivedi D, Wiggin M, Jetha N N and Marziali A 2007 Noise analysis and reduction in solid-state nanopores Nanotechnology 18 305505 (Pubitemid 47121744)
26. van den Hout M, Hall A R, Wu M Y, Zandbergen H W, Dekker C and Dekker N H 2010 Controlling nanopore size, shape and stability Nanotechnology 21 115304
27. van den Hout M, Krudde V, Janssen X J A and Dekker N H 2010 Distinguishable populations report on the interactions of single DNA molecules with solid-state nanopores Biophys. J. 99 3840-8
28. van den Hout M, Skinner G M, Klijnhout S, Krudde V and Dekker N H 2011 The passage of homopolymeric RNA through small solid-state nanopores Small 7 2217-24
29. Wanunu M, Bhattacharya S, Xie Y, Tor Y, Aksimentiev A and Drndic M 2011 Nanopore analysis of individual RNA/antibiotic complexes ACS Nano 5 9345-53
30. Wanunu M, Dadosh T, Ray V, Jin J M, McReynolds L and Drndic M 2010 Rapid electronic detection of probe-specific microRNAs using thin nanopore sensors Nature Nanotechnol. 5 807-14
31. Wanunu M, Sutin J and Meller A 2009 DNA profiling using solid-state nanopores: detection of DNA-binding molecules Nano Lett. 9 3498-502
32. Williams K R, Gupta K and Wasilik M 2003 Etch rates for micromachining processing - part II J. Microelectromech. Syst. 12 761-78
33. Williams K R and Muller R S 1996 Etch rates for micromachining processing J. Microelectromech. Syst. 5 256-69 (Pubitemid 126607095)
34. Yang J, Ferranti D C, Stern L A, Sanford C A, Huang J, Ren Z, Qin L-C and Hall A R 2011 Rapid and precise scanning helium ion microscope milling of solid-state nanopores for biomolecule detection Nanotechnology 22 285310