Design and fabrication of PMMA-micromachined fluid lens based on electromagnetic actuation on PMMA-PDMS bonded membrane

Journal of Micromechanics and Microengineering

Volumn 22, Issue 11, 2012, Pages

  Lee, June Kyoo ^a   Park, Kyung Woo ^a   Choi, Ju Chan ^a   Kim, Hak Rin ^a   Kong, Seong Ho ^a  

^a Kyungpook National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING TECHNIQUES; COMPUTER NUMERICAL CONTROL; DYNAMIC FOCUSING; ELECTROMAGNETIC ACTUATION; ELECTROMAGNETIC ACTUATORS; FLUIDIC CHAMBER; FLUIDIC PRESSURE; INTERMEDIATE LAYERS; MICRO MILLING; MICROMACHINED; PDMS MEMBRANE; POLYDIMETHYLSILOXANE MEMBRANE; REPULSIVE FORCES; THERMAL CROSSTALK; TUNABILITIES; WINDING TURNS;

COMPUTER CONTROL SYSTEMS; ELECTRIC ACTUATORS; ELECTROMAGNETISM; ELECTROMAGNETS; ESTERS; FABRICATION; FINITE ELEMENT METHOD; MAGNETIC MOMENTS;

MICROCHANNELS;

EID: 84867964251     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/22/11/115028     Document Type: Article

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