Miniaturized PMMA ball-valve micropump with cylindrical electromagnetic actuator

Microelectronic Engineering

Volumn 85, Issue 5-6, 2008, Pages 1104-1107

  Shen, Meng ^a   Yamahata, Christophe ^a   Gijs, Martin A M ^a  

^a EPFL   (Switzerland)

Author keywords

Ball valve; Electromagnetic actuator; FEM; Micropump; PMMA

Indexed keywords

ELECTROMAGNETIC FIELDS; FINITE ELEMENT METHOD; MICROFLUIDICS; POLYDIMETHYLSILOXANE; POLYMETHYL METHACRYLATES;

ELECTROMAGNETIC ACTUATOR; MICROPATTERNING;

ACTUATORS;

EID: 44149097421     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.12.013     Document Type: Article

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