Varifocal liquid lenses with integrated actuator, high focusing power and low operating voltage fabricated on 200 mm wafers

Sensors and Actuators, A: Physical

Volumn 172, Issue 1, 2011, Pages 280-286

  Pouydebasque, Arnaud ^a   Bridoux, Claudine ^a   Jacquet, Fabrice ^a   Moreau, Stéphane ^a   Sage, Eric ^a   Saint Patrice, Damien ^a   Bouvier, Christophe ^a   Kopp, Christophe ^a   Marchand, Gilles ^a   Bolis, Sébastien ^a   Sillon, Nicolas ^a   Vigier Blanc, Emmanuelle ^b  

^a CEA GRENOBLE   (France)

^b STMICROELECTRONICS   (France)

Author keywords

Electrostatic actuation; Liquid lens; Varifocal

Indexed keywords

ANNULAR ELECTRODES; AUTO-FOCUS; CAMERA PHONE; COMPACT DEVICES; ELECTROSTATIC ACTUATION; GLASS WAFER; HIGH PERMITTIVITY; INTEGRATED ACTUATOR; LIQUID LENS; LOW COSTS; LOW OPERATING VOLTAGE; LOW VOLTAGES; MICROELECTRONICS PROCESS; OPTICAL POWER; PARALLEL PLATES; POLYMER MEMBRANE; SUPPLY VOLTAGES; VARIFOCAL; WAVEFRONT MEASUREMENT;

ACTUATORS; ELECTRODES; ELECTROSTATIC ACTUATORS; ELECTROSTATIC LENSES; ELECTROSTATICS; FUNCTIONAL POLYMERS; GLASS; GLASS MEMBRANE ELECTRODES; LIQUID MEMBRANE ELECTRODES; MICROELECTRONICS;

LIQUIDS;

EID: 82755193834     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2011.05.005     Document Type: Conference Paper

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