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Volumn 45, Issue 12-13, 2005, Pages 1542-1550

Enhanced machining of micron-scale features in microchip molding masters by CNC milling

Author keywords

CNC milling; Machining; MEMS; Micro endmill; Molding Master

Indexed keywords

COMPUTATIONAL COMPLEXITY; COMPUTATIONAL METHODS; FOURIER TRANSFORMS; MICROELECTROMECHANICAL DEVICES; MOLDING; ROLLING MILLS; STRUCTURAL LOADS;

EID: 20444443507     PISSN: 08906955     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijmachtools.2005.01.016     Document Type: Article
Times cited : (44)

References (31)
  • 1
    • 0034939284 scopus 로고    scopus 로고
    • Microchip electrophoretic separation systems for biomedical and pharmaceutical analysis
    • A.J. Gawron, R.S. Martin, and S.M. Lunte Microchip electrophoretic separation systems for biomedical and pharmaceutical analysis Eur. J. Pharm. Sci. 14 2001 1 12
    • (2001) Eur. J. Pharm. Sci. , vol.14 , pp. 1-12
    • Gawron, A.J.1    Martin, R.S.2    Lunte, S.M.3
  • 2
    • 0036209748 scopus 로고    scopus 로고
    • Polymer microfluidic chips for electrochemical and biochemical analyses
    • J. Rossier, F. Reymond, and P.E. Michel Polymer microfluidic chips for electrochemical and biochemical analyses Electrophoresis 23 2002 858 867
    • (2002) Electrophoresis , vol.23 , pp. 858-867
    • Rossier, J.1    Reymond, F.2    Michel, P.E.3
  • 3
    • 0034797080 scopus 로고    scopus 로고
    • High-throughput characterization for organic pollutants in environmental waters using a capillary electrophoresis chip
    • S. Wakida, A. Chiba, T. Matsuda, K. Fukushi, H. Nakanishi, X. Wu, H. Nagai, S. Kurosawa, and S. Takeda High-throughput characterization for organic pollutants in environmental waters using a capillary electrophoresis chip Electrophoresis 22 2001 3505 3508
    • (2001) Electrophoresis , vol.22 , pp. 3505-3508
    • Wakida, S.1    Chiba, A.2    Matsuda, T.3    Fukushi, K.4    Nakanishi, H.5    Wu, X.6    Nagai, H.7    Kurosawa, S.8    Takeda, S.9
  • 4
    • 0036500003 scopus 로고    scopus 로고
    • Single-channel microchip for fast screening and detailed identification of nitroaromatic explosives or organophosphate nerve agents
    • J. Wang, M. Pumera, P.M. Chatrathi, A. Escarpa, M. Musameh, G. Collins, A. Mulchani, L. Yuehe, and K. Olsen Single-channel microchip for fast screening and detailed identification of nitroaromatic explosives or organophosphate nerve agents Anal. Chem. 74 2002 1187 1191
    • (2002) Anal. Chem. , vol.74 , pp. 1187-1191
    • Wang, J.1    Pumera, M.2    Chatrathi, P.M.3    Escarpa, A.4    Musameh, M.5    Collins, G.6    Mulchani, A.7    Yuehe, L.8    Olsen, K.9
  • 7
    • 0031244526 scopus 로고    scopus 로고
    • Developments in technology and applications of microsystems
    • M.U. Kopp, H.J. Crabtree, and A. Manz Developments in technology and applications of microsystems Curr. Opin. Chem. Biol. 1 1997 410 419
    • (1997) Curr. Opin. Chem. Biol. , vol.1 , pp. 410-419
    • Kopp, M.U.1    Crabtree, H.J.2    Manz, A.3
  • 8
    • 0033732466 scopus 로고    scopus 로고
    • Hot embossing as a method for the fabrication of polymer high aspect ratio structures
    • H. Becker, and U. Heim Hot embossing as a method for the fabrication of polymer high aspect ratio structures Sens. Actuators A 83 2000 130 135
    • (2000) Sens. Actuators a , vol.83 , pp. 130-135
    • Becker, H.1    Heim, U.2
  • 10
    • 0000670335 scopus 로고    scopus 로고
    • Hot embossing - The molding technique for plastic microstructures
    • M. Heckele, W. Bacher, and K.D. Müller Hot embossing - the molding technique for plastic microstructures Microsys. Tech. 4 1998 122 124
    • (1998) Microsys. Tech. , vol.4 , pp. 122-124
    • Heckele, M.1    Bacher, W.2    Müller, K.D.3
  • 12
    • 0041396712 scopus 로고    scopus 로고
    • Rapid fabrication of microfluidic devices in poly(dimethysiloxane) by photocopying
    • A. Tan, K. Rodgers, J.P. Murrihy, C. O'Mathuna, and J.D. Glennon Rapid fabrication of microfluidic devices in poly(dimethysiloxane) by photocopying Lab Chip 1 2001 7 9
    • (2001) Lab Chip , vol.1 , pp. 7-9
    • Tan, A.1    Rodgers, K.2    Murrihy, J.P.3    O'Mathuna, C.4    Glennon, J.D.5
  • 13
    • 2342574189 scopus 로고    scopus 로고
    • Rapid fabrication of a poly(dimethylsiloxane) microfluidic capillary gel electrophoresis system utilizing high precision machining
    • D.S. Zhao, B. Roy, M.T. McCormick, W.G. Kuhr, and S.A. Brazill Rapid fabrication of a poly(dimethylsiloxane) microfluidic capillary gel electrophoresis system utilizing high precision machining Lab Chip 3 2003 93 99
    • (2003) Lab Chip , vol.3 , pp. 93-99
    • Zhao, D.S.1    Roy, B.2    McCormick, M.T.3    Kuhr, W.G.4    Brazill, S.A.5
  • 14
    • 0000596826 scopus 로고    scopus 로고
    • Microelectromechanical systems (MEMS) fabricated in polymeric materials: Applications in chemistry and life sciences
    • S.A. Soper, S.M. Ford, S. Qi, R.L. McCarley, K. Kelly, and M.C. Murphy Microelectromechanical systems (MEMS) fabricated in polymeric materials: Applications in chemistry and life sciences Anal. Chem. 72 2000 642A 651A
    • (2000) Anal. Chem. , vol.72
    • Soper, S.A.1    Ford, S.M.2    Qi, S.3    McCarley, R.L.4    Kelly, K.5    Murphy, M.C.6
  • 17
    • 0343550309 scopus 로고    scopus 로고
    • Polymer microfabrication methods for microfluidic analytical applications
    • H. Becker, and C. Gärtner Polymer microfabrication methods for microfluidic analytical applications Electrophoresis 21 2000 12 26
    • (2000) Electrophoresis , vol.21 , pp. 12-26
    • Becker, H.1    Gärtner, C.2
  • 18
    • 0042922825 scopus 로고    scopus 로고
    • Covalent immobilization of proteases and nucleases to poly(methymethacrylate)
    • W.D. Dominick, B.T. Berhane, J.S. Mecomber, and P.A. Limbach Covalent immobilization of proteases and nucleases to poly(methymethacrylate) Anal. Bioanal. Chem. 376 2003 349 354
    • (2003) Anal. Bioanal. Chem. , vol.376 , pp. 349-354
    • Dominick, W.D.1    Berhane, B.T.2    Mecomber, J.S.3    Limbach, P.A.4
  • 19
  • 20
    • 0032645393 scopus 로고    scopus 로고
    • Microstructure grooves with a width of less than 50 μm cut with ground hard metal micro end mills
    • T. Schaller, L. Bohn, J. Mayer, and K. Schubert Microstructure grooves with a width of less than 50 μm cut with ground hard metal micro end mills Prec. Eng. 23 1999 229 235
    • (1999) Prec. Eng. , vol.23 , pp. 229-235
    • Schaller, T.1    Bohn, L.2    Mayer, J.3    Schubert, K.4
  • 21
    • 20444503207 scopus 로고    scopus 로고
    • Chicago: McMaster Carr
    • Mcmaster carr catalog. Chicago: McMaster Carr, 2003.
    • (2003) Mcmaster Carr Catalog
  • 23
    • 0030108714 scopus 로고    scopus 로고
    • Development of the micromilling process for high-aspect ratio microstructures
    • C.R. Friedrich, and M.J. Vasile Development of the micromilling process for high-aspect ratio microstructures J. Microelectromech. Sys. 5 1996 33 38
    • (1996) J. Microelectromech. Sys. , vol.5 , pp. 33-38
    • Friedrich, C.R.1    Vasile, M.J.2
  • 24
    • 0036283726 scopus 로고    scopus 로고
    • Integrating micromachined devices with modern mass spectrometry
    • P.A. Limbach, and Z. Meng Integrating micromachined devices with modern mass spectrometry Analyst 127 2002 693 700
    • (2002) Analyst , vol.127 , pp. 693-700
    • Limbach, P.A.1    Meng, Z.2
  • 25
    • 0034661569 scopus 로고    scopus 로고
    • Development of multichannel devices with an array of electrospray tips for high-throughput mass spectrometry
    • H. Liu, C. Felten, Q. Xue, B. Zhang, P. Jedrzejewski, B.L. Karger, and F. Foret Development of multichannel devices with an array of electrospray tips for high-throughput mass spectrometry Anal. Chem. 72 2000 3303 3310
    • (2000) Anal. Chem. , vol.72 , pp. 3303-3310
    • Liu, H.1    Felten, C.2    Xue, Q.3    Zhang, B.4    Jedrzejewski, P.5    Karger, B.L.6    Foret, F.7
  • 26
    • 0032732346 scopus 로고    scopus 로고
    • Microfabricated polymer devices for automated sample delivery of peptides for analysis by electrospray ionization tandem mass spectrometry
    • J.H. Chan, A.T. Timperman, D. Qin, and R. Aebersold Microfabricated polymer devices for automated sample delivery of peptides for analysis by electrospray ionization tandem mass spectrometry Anal. Chem. 71 1999 4437 4444
    • (1999) Anal. Chem. , vol.71 , pp. 4437-4444
    • Chan, J.H.1    Timperman, A.T.2    Qin, D.3    Aebersold, R.4
  • 27
    • 0034212211 scopus 로고    scopus 로고
    • Analytical microdevices for mass spectrometry
    • R.D. Oleschuk, and D.J. Harrison Analytical microdevices for mass spectrometry Trends Anal. Chem. 19 2000 379 388
    • (2000) Trends Anal. Chem. , vol.19 , pp. 379-388
    • Oleschuk, R.D.1    Harrison, D.J.2
  • 28
    • 0035866596 scopus 로고    scopus 로고
    • Interfacing a polymer-based micromachined device to a nanoelectrospray ionization fourier transform ion cyclotron resonance mass spectrometer
    • Z.J. Meng, S.Z. Qi, S.A. Soper, and P.A. Limbach Interfacing a polymer-based micromachined device to a nanoelectrospray ionization fourier transform ion cyclotron resonance mass spectrometer Anal. Chem. 73 2001 1286 1291
    • (2001) Anal. Chem. , vol.73 , pp. 1286-1291
    • Meng, Z.J.1    Qi, S.Z.2    Soper, S.A.3    Limbach, P.A.4
  • 30
    • 0037144250 scopus 로고    scopus 로고
    • Micro devices integrated with microchannels and electrospray nozzles using pdms casting techniques
    • C.-H. Chio, G-B. Lee, H-T. Hsu, P-W. Chen, and P-C. Liao Micro devices integrated with microchannels and electrospray nozzles using pdms casting techniques Sens. Actuators B 86 2002 280 286
    • (2002) Sens. Actuators B , vol.86 , pp. 280-286
    • Chio, C.-H.1    Lee, G.-B.2    Hsu, H.-T.3    Chen, P.-W.4    Liao, P.-C.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.