Design and fabrication of a mid-wavelength infrared Fresnel lens via liquid poly(methyl methacrylate)

Journal of Micromechanics and Microengineering

Volumn 22, Issue 4, 2012, Pages

  Tsui, Chun Chao ^a   Wei, Hsiang Chun ^a   Chang, Wen Fa ^a   Su, Guo Dung John ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

DAILY LIVES; DESIGN PARAMETERS; FABRICATION PROCESS; FOCAL LENGTHS; FRESNEL LENS; INFRARED LENS; INFRARED RANGE; LOW COSTS; MACHINING PROCESS; MID-INFRARED RANGE; MID-WAVELENGTH INFRARED; MOLDING PROCESS; OPTICAL ANALYSIS; POLYMER MATERIALS;

ESTERS; FABRICATION; LIQUIDS; OPTICAL INSTRUMENT LENSES; OPTICAL PROPERTIES;

INFRARED RADIATION;

EID: 84858791173     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/22/4/045010     Document Type: Article

References (20)

1. Yon J J, Mottin E, Biancardini L, Letellier L and Tissot J 2003 Infrared microbolometer sensors and their application in automotive safety Adv. Microsyst. Automot. Appl. 2003 13757
2. Fischer R E, Tadic-Galeb B and Yoder P R 2000 Optical System Design (New York: McGraw Hill) p 213
3. Zhang X et al 2003 Production of complex chalcogenide glass optics by molding for thermal imaging J. Non-Cryst. Solids 327 519
4. Horwitz J 2011 Infrared refractive index of polyethylene and a polyethylene-based material Opt. Eng. 50 093603
5. Sankar V, Kumar T S and Rao K P 2004 Preparation, characterization and fabrication of intraocular lens from photo initiated polymerized poly (methyl methacrylate) Trends Biomater. Artif. Organs 17 2430
6. Li L et al 2006 Fabrication of diffractive optics by use of slow tool servo diamond turning process Opt. Eng. 45 113401
7. Miller D et al 2010 Durability of poly(methyl methacrylate) lenses used in concentrating photovoltaic modules Proc. SPIE 7773 777303
8. Zailer I et al 1996 Crosslinked PMMA as a high-resolution negative resist for electron beam lithography and applications for physics of low-dimensional structures Semicond. Sci. Technol. 11 1235
9. Watanabe T et al 1998 Influence of humidity on refractive index of polymers for optical waveguide and its temperature dependence Appl. Phys. Lett. 72 1533
10. Priyadarshi A et al Refractive indices variation with temperature and humidity of optical adhesive J. Electron. Mater. 34 1378
11. Tighilt F Z et al 2007 Morphology and specific interaction of PMMA coating with the surface of porous silicon Surf. Sci. 601 421721
12. Vicker D and LeBlanc R 2001 Midwave infrared imager with plastic laminated diffractive/aspheric surfaces Proc. Conf. Infrared Technology and Applications XXVII (Orlando, FL, USA,) pp 6428
13. Nachmias T, Ohayon A, Meltzer S E, Kabla M, Louzon E and Levy U 2009 Shallow Fresnel lens fabrication using grayscale lithography made by high energy beam sensitive mask (HEBS) technology and reactive ion etching Proc. Conf. Advanced Fabrication Technologies for Micro/Nano Optics and Photonics II pp 72050B
14. OShea D C, Suleski T J, Kathman A D and Prather D W et al 2003 Diffractive Optics: Design, Fabrication, and Test vol TT62 (Bellingham, WA: SPIE)
15. Saito M et al 1995 Optical constants of polymer coatings in the infrared Infrared Phys. Technol. 36 11259
16. Fujita T, Nishihara H and Koyama J 1982 Blazed gratings and Fresnel lenses fabricated by electron-beam lithography Opt. Lett. 7 57880
17. Daschner W, Long P, Larsson M and Lee S H 1995 Fabrication of diffractive optical elements using a single optical exposure with a gray level mask J. Vac. Sci. Technol. B 13 272931
18. Fonollosa J et al 2006 Fresnel lenses: study and fabrication in silicon technology for medium-IR applications Proc. Conf. MEMS, MOEMS, and Micromachining (Strasbourg, France,) p61860R-11
19. Riedl M J and McCann J T 1991 Analysis and performance limits of diamond turned diffractive lenses for the 35 and 812 micrometer regions Analysis 38:09 15363
20. Rastani K et al 1991 Binary phase Fresnel lenses for generation of two-dimensional beam arrays Appl. Opt. 30 1346