Sol-gel based fabrication of hybrid microfluidic devices composed of PDMS and thermoplastic substrates

Sensors and Actuators, B: Chemical

Volumn 148, Issue 1, 2010, Pages 323-329

  Suzuki, Yusuke ^a   Yamada, Masumi ^a   Seki, Minoru ^a  

^a CHIBA UNIVERSITY   (Japan)

Author keywords

Microfabrication; Microfluidic device; Polydimethylsiloxane; Sol gel method; Thermoplastics

Indexed keywords

ACTIVE COMPONENTS; BONDING STRENGTH; COATED SURFACE; DROPLET GENERATION; FLEXIBLE PLASTIC SUBSTRATES; MICRO DEVICES; MICRO-FLUIDIC DEVICES; MICROCHANNEL NETWORK; MICROFLUIDIC DEVICE; PARALLEL FLOWS; PDMS-PMMA; POLYDIMETHYLSILOXANE PDMS; SILICA LAYERS; SILICA SOLS; SOL-GEL METHOD; SOL-GEL METHODS; TETRAETHOXYSILANES;

CHLORINE COMPOUNDS; ESTERS; FLUIDIC DEVICES; FUNCTIONAL POLYMERS; MICROANALYSIS; MICROCHANNELS; MICROFABRICATION; MICROFLUIDICS; MICROMACHINING; OXIDES; PARALLEL FLOW; POLYVINYL CHLORIDES; REINFORCED PLASTICS; SILICA; SILICA GEL; SILICONES; SOL-GELS; SOLS; THERMOPLASTICS; THREE DIMENSIONAL;

SOL-GEL PROCESS;

EID: 77953914532     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2010.04.018     Document Type: Article

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