Batch-fabricated cantilever probes with electrical shielding for nanoscale dielectric and conductivity imaging

Journal of Micromechanics and Microengineering

Volumn 22, Issue 11, 2012, Pages

  Yang, Yongliang ^a,b   Lai, Keji ^b   Tang, Qiaochu ^a   Kundhikanjana, Worasom ^b   Kelly, Michael A ^b   Zhang, Kun ^a   Shen, Zhi Xun ^b   Li, Xinxin ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

^b STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CANTILEVER PROBE; CONDUCTIVITY IMAGING; HIGH SENSITIVITY; MICROWAVE IMPEDANCE; NANO SCALE; PROBE TIPS; SERIES RESISTANCES; TIP APEX; VARIABLE TEMPERATURE; WAFER SCALE;

DIELECTRIC MATERIALS; ELECTRIC RESISTANCE; NANOTECHNOLOGY; PROBES; SHIELDING;

NANOCANTILEVERS;

EID: 84867948005     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/22/11/115040     Document Type: Article

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