AlN-on-Si SAW filters: Influence of film thickness, IDT geometry and substrate conductivity

Proceedings - IEEE Ultrasonics Symposium

Volumn 4, Issue , 2005, Pages 1900-1904

  Clement, M ^a   Vergara, L ^a   Iborra, E ^a   Sanz Hervas A ^a   Olivares, J ^a   Sangrador, J ^a  

^a UNIVERSIDAD POLITÉCNICA DE MADRID   (Spain)

Author keywords

AIN; Electrical model; SAW filters; Stray elements

Indexed keywords

ALUMINUM COMPOUNDS; ELECTRIC CONDUCTIVITY; FREQUENCY RESPONSE; SCATTERING PARAMETERS; SILICON; SUBSTRATES;

ALN FILMS; ELECTRICAL MODEL; SILICON SUBSTRATES; STRAY ELEMENTS;

ACOUSTIC SURFACE WAVE FILTERS;

EID: 33847131000     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2005.1603244     Document Type: Conference Paper

References (8)

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