Study of ZnO:Al films for silicon thin film solar cells

Applied Surface Science

Volumn 261, Issue , 2012, Pages 268-275

  Zhu, H ^a   Hupkes J ^a   Bunte, E ^a   Huang, S M ^b  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

^b China   (China)

Author keywords

Chemical wet etching; Magnetron sputtering; Rotatable target; ZnO:Al thin films

Indexed keywords

ALUMINUM COATINGS; ALUMINUM OXIDE; AMORPHOUS FILMS; AMORPHOUS SILICON; CARRIER MOBILITY; CERAMIC MATERIALS; DEPOSITION RATES; II-VI SEMICONDUCTORS; MAGNETRON SPUTTERING; METALLIC FILMS; MICROCRYSTALLINE SILICON; OPTICAL FILMS; SILICON SOLAR CELLS; SOLAR CELLS; SUBSTRATES; SURFACE STRUCTURE; THIN FILMS; TRANSPARENT CONDUCTING OXIDES; WET ETCHING; ZINC OXIDE;

ALUMINUM DOPED ZINC OXIDES (ZNO:AL); CHEMICAL WET ETCHING; CHEMICAL WET ETCHING PROCESS; HYDROGENATED MICROCRYSTALLINE SILICON; OPTICAL AND ELECTRICAL PROPERTIES; ROTATABLE TARGETS; SILICON THIN-FILM SOLAR CELLS; ZNO:AL THIN FILMS;

THIN FILM SOLAR CELLS;

EID: 84867746588     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2012.07.159     Document Type: Article

References (40)

1. B. Rech, and H. Wagner Applied Physics A: Materials Science & Processing 69 2 1999 155
2. H. Keppner, J. Meier, P. Torres, D. Fischer, and A. Shah Applied Physics A: Materials Science & Processing 69 2 1999 169
3. J. Müller, O. Kluth, S. Wieder, H. Siekmann, G. Schope, W. Reetz, O. Vetterl, D. Lundszien, A. Lambertz, F. Finger, B. Rech, and H. Wagner Solar Energy Materials and Solar Cells 66 1-4 2001 275
4. J. Müller, G. Schope, O. Kluth, B. Rech, M. Ruske, J. Trube, B. Szyszka, X. Jiang, and G. Brauer Thin Solid Films 392 2 2001 327
5. O. Kluth, B. Rech, L. Houben, S. Wieder, G. Schope, C. Beneking, H. Wagner, A. Loffl, and H.W. Schock Thin Solid Films 351 1-2 1999 247
6. J.I. Owen Photovoltaics (IEK-5), Institute of Energy and Climate Research (IEK), Forschungszentrum Jülich GmbH 2011 RWTH Aachen University Aachen
7. O. Kluth, G. Schöpe, J. Hüpkes, C. Agashe, J. Müller, and B. Rech Thin Solid Films 442 1-2 2003 80
8. M. Berginski, J. Hüpkes, M. Schulte, G. Schöpe, H. Stiebig, B. Rech, and M. Wuttig Journal of Applied Physics 101 7 2007 074903-1
9. M. Berginski, B. Rech, J. Hüpkes, H. Stiebig, and M. Wuttig SPIE 2006 Photonics Strasbourg, France
10. H. Zhu, J. Hüpkes, E. Bunte, and S.M. Huang Applied Surface Science 256 2010 4601
11. H. Zhu, J. Hüpkes, E. Bunte, and S.M. Huang Surface & Coatings Technology 205 2010 773
12. M. Mizuhashi, Y. Gotoh, and K. Adachi Japanese Journal of Applied Physics Part 1: Regular Papers Short Notes & Review Papers 27 11 1988 2053
13. K.H. Kim, K.C. Park, and D.Y. Ma Journal of Applied Physics 81 12 1997 7764
14. B. Szyszka Thin Solid Films 351 1-2 1999 164
15. T. Minami, H. Nanto, and S. Takata Japanese Journal of Applied Physics Part 2: Letters 23 5 1984 L280
16. R.L. Petritz Physical Review 104 6 1956 1508
17. K.L. Chopra, S. Major, and D.K. Pandya Thin Solid Films 102 1 1983 1
18. J.W. Orton, and M.J. Powell Reports on Progress in Physics 43 11 1980 1263
19. T. Minami, H. Sato, H. Nanto, and S. Takata Japanese Journal of Applied Physics Part 2: Letters 24 10 1985 L781
20. K. Tominaga, K. Kuroda, and O. Tada Japanese Journal of Applied Physics Part 1: Regular Papers Short Notes & Review Papers 27 7 1988 1176
21. T. Minami, H. Sato, T. Sonoda, H. Nanto, and S. Takata Thin Solid Films 171 2 1989 307
22. C. David, T. Girardeau, F. Paumier, D. Eyidi, B. Lacroix, N. Papathanasiou, B.P. Tinkham, P. Guerin, and M. Marteau Journal of Physics: Condensed Matter 23 2011 3343209
23. H.W. Lee, S.P. Lau, Y.G. Wang, B.K. Tay, and H.H. Hng Thin Solid Films 458 1-2 2004 15
24. B. Szyszka, V. Sittinger, X. Jiang, R.J. Hong, W. Werner, A. Pflug, M. Ruske, and A. Lopp Thin Solid Films 442 1-2 2003 179
25. O. Kappertz, R. Drese, J.M. Ngaruiya, and M. Wuttig Thin Solid Films 484 1-2 2005 64
26. J.M. Ngaruiya, O. Kappertz, S.H. Mohamed, and M. Wuttig Applied Physics Letters 85 5 2004 748
27. T.P. Drüsedau, M. Löhmann, and B. Garke Journal of Vacuum Science & Technology A: Vacuum Surfaces and Films 16 4 1998 2728
28. O. Kappertz, R. Drese, and M. Wuttig Journal of Vacuum Science & Technology A: Vacuum Surfaces and Films 20 6 2002 2084
29. I. Petrov, V. Orlinov, and A. Misiuk Thin Solid Films 120 1 1984 55
30. J.A. Thornton Journal of Vacuum Science & Technology A: Vacuum Surfaces and Films 4 6 1986 3059
31. H. Maki, T. Ikoma, I. Sakaguchi, N. Ohashi, H. Haneda, J. Tanaka, and N. Ichinose Thin Solid Films 411 1 2002 91
32. K. Ellmer, A. Klein, and B. Rech Transparent Conductive Zinc Oxide Basics and Applications in Thin Film Solar Cells 2008 Springer Berlin
33. J. Hüpkes, J.I. Owen, S.E. Pust, and E. Bunte ChemPhysChem 13 2012 66
34. J. Bailat, D. Domine, R. Schluchter, J. Steinhauser, S. Fay, F. Freitas, C. Bucher, L. Feitknecht, X. Niquille, T. Tscharner, A. Shah, and C. Ballif IEEE High-Efficiency p-i-n Microcrystalline and Micromorph Thin Film Silicon Solar Cells Deposited on LPCVD ZnO Coated Glass Substrates 2006 IEEE New York
35. M. Python, O. Madani, D. Domine, F. Meillaud, E. Vallat-Sauvain, and C. Ballif Solar Energy Materials and Solar Cells 93 10 2009 1714
36. F. Meillaud, A. Feltrin, D. Domine, P. Buehlmann, M. Python, G. Bugnon, A. Billet, G. Parascandolo, J. Bailat, S. Fay, N. Wyrsch, C. Ballif, and A. Shah Philosophical Magazine 89 28-30 2009 2599
37. O. Kluth, J. Kalas, M. Fecioru-Morariu, P.A. Losio, and J. Hoetzel The 26th European Photovoltaic Solar Energy Conference and Exhibition Hamburg, Germany 2011 2354
38. B. Rech, T. Roschek, T. Repmann, J. Muller, R. Schmitz, and W. Appenzeller Thin Solid Films 427 1-2 2003 157
39. E. Bunte, H. Zhu, J. Hüpkes, and J. Owen EPJ Photovoltaics 2 2011 20602
40. H. Zhu, J. Hüpkes, E. Bunte, J. Owen, and S.M. Huang Solar Energy Materials and Solar Cells 95 2011 964